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- W2001912422 abstract "A novolac resin resist (ONPR-800) is exposed to 50 keV Ga focused ion beam (FIB) to create a fine line pattern by a self-development process. A dose dependence of the self-developed depth shows a rapid increase at some critical dose of about 3x10 -2 C/cm 2 . Furthermore, it is found out that the shape of the groove is considerably affected by the tensile force in the resist film. We can obtain grooves with the width of 40 nm and the aspect ratio of 40 by eliminating the stress. Gold line pattern of a 0.1 μm width is successfully produced by electroplating into the self-developed resist pattern." @default.
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- W2001912422 date "1987-06-30" @default.
- W2001912422 modified "2023-09-23" @default.
- W2001912422 title "10 Nm Fabrication By Focused Ion Beam" @default.
- W2001912422 doi "https://doi.org/10.1117/12.940371" @default.
- W2001912422 hasPublicationYear "1987" @default.
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