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- W2001938706 abstract "Abstract We present here the substitutional carbon dependence of ClusterCarbon implant energy and dose, and anneal parameters such as solid phase epitaxial regrowth (SPER) temperature and various high temperature millisecond flash anneal conditions. With a multiple implant sequence of carbon implants one can obtain a fairly uniform carbon profile and we show that it provides better carbon substitution [C]sub when compared to a single implant. It is been established that optimizing the percentage of [C]sub requires an SPER anneal temperature 2%. For a given millisecond anneal and for implants with various energies and doses we show that the percentages of [C]sub increases linearly with the fraction of carbon dopants within the amorphous layer." @default.
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- W2001938706 date "2008-12-01" @default.
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- W2001938706 title "Optimization of ClusterCarbon™ process parameters for strained Si lattice" @default.
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- W2001938706 doi "https://doi.org/10.1016/j.mseb.2008.09.039" @default.
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