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- W2001948944 abstract "It has been found that by utilizing a sharp needle for the extractor electrode in close proximity to the source tip wetted with Cu3P liquid alloy, a large increase (factor ∼300) in ion current is observed in comparison to standard liquid metal ion sources (LMIS’s). In standard previously used LMIS’s the extractor electrode was a flat plane with a circular hole centered on the source needle tip. This new high current source has important applications in focused and broad ion beam deposition systems." @default.
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- W2001948944 date "1987-12-21" @default.
- W2001948944 modified "2023-09-26" @default.
- W2001948944 title "High current Cu<sub>3</sub>P liquid metal ion source using a novel extractor configuration" @default.
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- W2001948944 doi "https://doi.org/10.1063/1.98931" @default.
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