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• W2001977203 endingPage "194" @default.
• W2001977203 startingPage "187" @default.
• W2001977203 abstract "The elemental and structural changes of 248nm DUV photoresist induced by arsenic implantation with high dose and different acceleration energies were studied. For this purpose different analytical techniques were combined. An investigation of the capabilities of the Micro Raman Spectroscopy for analysis of ion implanted photoresist (II-PR) revealed that the method is unreliable for the characterization of II-PR since it induces a modification of the top crust layer. Moreover, alternative methods were used for characterization of the crust. The crust structure was indentified as cross-linked PR by Solid State Nuclear Magnetic Resonance. No experimental evidence for presence of amorphous carbon was found. Furthermore, the elemental composition and mechanical properties of the crust as a function of the implant energy were discussed as a measure for the cross-linking density. Finally, the dopant role in the cross-link process was considered." @default.
• W2001977203 created "2016-06-24" @default.
• W2001977203 creator A5027608012 @default.
• W2001977203 creator A5030680362 @default.
• W2001977203 creator A5030807663 @default.
• W2001977203 creator A5033660264 @default.
• W2001977203 creator A5034373550 @default.
• W2001977203 creator A5043844856 @default.
• W2001977203 creator A5053777799 @default.
• W2001977203 creator A5055367643 @default.
• W2001977203 creator A5056576628 @default.
• W2001977203 creator A5061536795 @default.
• W2001977203 date "2009-09-25" @default.
• W2001977203 modified "2023-10-18" @default.
• W2001977203 title "Characterization of 248nm Deep Ultraviolet (DUV) Photoresist after Ion Implantation" @default.
• W2001977203 doi "https://doi.org/10.1149/1.3202652" @default.
• W2001977203 hasPublicationYear "2009" @default.
• W2001977203 type Work @default.
• W2001977203 sameAs 2001977203 @default.
• W2001977203 citedByCount "7" @default.
• W2001977203 countsByYear W20019772032012 @default.
• W2001977203 crossrefType "journal-article" @default.
• W2001977203 hasAuthorship W2001977203A5027608012 @default.
• W2001977203 hasAuthorship W2001977203A5030680362 @default.
• W2001977203 hasAuthorship W2001977203A5030807663 @default.
• W2001977203 hasAuthorship W2001977203A5033660264 @default.
• W2001977203 hasAuthorship W2001977203A5034373550 @default.
• W2001977203 hasAuthorship W2001977203A5043844856 @default.
• W2001977203 hasAuthorship W2001977203A5053777799 @default.
• W2001977203 hasAuthorship W2001977203A5055367643 @default.
• W2001977203 hasAuthorship W2001977203A5056576628 @default.
• W2001977203 hasAuthorship W2001977203A5061536795 @default.
• W2001977203 hasConcept C104779481 @default.
• W2001977203 hasConcept C113196181 @default.
• W2001977203 hasConcept C120665830 @default.
• W2001977203 hasConcept C121332964 @default.
• W2001977203 hasConcept C134406635 @default.
• W2001977203 hasConcept C140205800 @default.
• W2001977203 hasConcept C145148216 @default.
• W2001977203 hasConcept C159985019 @default.
• W2001977203 hasConcept C171250308 @default.
• W2001977203 hasConcept C178790620 @default.
• W2001977203 hasConcept C185592680 @default.
• W2001977203 hasConcept C191897082 @default.
• W2001977203 hasConcept C191952053 @default.
• W2001977203 hasConcept C192562407 @default.
• W2001977203 hasConcept C199289684 @default.
• W2001977203 hasConcept C2776798109 @default.
• W2001977203 hasConcept C2779227376 @default.
• W2001977203 hasConcept C2780841128 @default.
• W2001977203 hasConcept C40003534 @default.
• W2001977203 hasConcept C41823505 @default.
• W2001977203 hasConcept C43617362 @default.
• W2001977203 hasConcept C49040817 @default.
• W2001977203 hasConcept C544956773 @default.
• W2001977203 hasConcept C550623735 @default.
• W2001977203 hasConcept C57863236 @default.
• W2001977203 hasConceptScore W2001977203C104779481 @default.
• W2001977203 hasConceptScore W2001977203C113196181 @default.
• W2001977203 hasConceptScore W2001977203C120665830 @default.
• W2001977203 hasConceptScore W2001977203C121332964 @default.
• W2001977203 hasConceptScore W2001977203C134406635 @default.
• W2001977203 hasConceptScore W2001977203C140205800 @default.
• W2001977203 hasConceptScore W2001977203C145148216 @default.
• W2001977203 hasConceptScore W2001977203C159985019 @default.
• W2001977203 hasConceptScore W2001977203C171250308 @default.
• W2001977203 hasConceptScore W2001977203C178790620 @default.
• W2001977203 hasConceptScore W2001977203C185592680 @default.
• W2001977203 hasConceptScore W2001977203C191897082 @default.
• W2001977203 hasConceptScore W2001977203C191952053 @default.
• W2001977203 hasConceptScore W2001977203C192562407 @default.
• W2001977203 hasConceptScore W2001977203C199289684 @default.
• W2001977203 hasConceptScore W2001977203C2776798109 @default.
• W2001977203 hasConceptScore W2001977203C2779227376 @default.
• W2001977203 hasConceptScore W2001977203C2780841128 @default.
• W2001977203 hasConceptScore W2001977203C40003534 @default.
• W2001977203 hasConceptScore W2001977203C41823505 @default.
• W2001977203 hasConceptScore W2001977203C43617362 @default.
• W2001977203 hasConceptScore W2001977203C49040817 @default.
• W2001977203 hasConceptScore W2001977203C544956773 @default.
• W2001977203 hasConceptScore W2001977203C550623735 @default.
• W2001977203 hasConceptScore W2001977203C57863236 @default.
• W2001977203 hasIssue "5" @default.
• W2001977203 hasLocation W20019772031 @default.
• W2001977203 hasOpenAccess W2001977203 @default.
• W2001977203 hasPrimaryLocation W20019772031 @default.
• W2001977203 hasRelatedWork W1907800457 @default.
• W2001977203 hasRelatedWork W1966205888 @default.
• W2001977203 hasRelatedWork W1976532946 @default.
• W2001977203 hasRelatedWork W2073159677 @default.
• W2001977203 hasRelatedWork W2108770648 @default.
• W2001977203 hasRelatedWork W2542978104 @default.
• W2001977203 hasRelatedWork W2808202007 @default.
• W2001977203 hasRelatedWork W2970779699 @default.
• W2001977203 hasRelatedWork W3023561649 @default.
• W2001977203 hasRelatedWork W4381739681 @default.
• W2001977203 hasVolume "25" @default.
• W2001977203 isParatext "false" @default.

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