Matches in SemOpenAlex for { <https://semopenalex.org/work/W2001990317> ?p ?o ?g. }
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- W2001990317 endingPage "1280" @default.
- W2001990317 startingPage "1276" @default.
- W2001990317 abstract "Hydrogen-methyl-siloxane-based porous spin-on-glass films were exposed to an oxidative plasma. The plasma exposure resulted in the loss of hydrophobic groups such as Si–H and Si–CH3. The formation of silanole groups, the decrease in film thickness, and moisture uptake were also observed. When the substrate was biased during exposure, these tendencies were found to be suppressed." @default.
- W2001990317 created "2016-06-24" @default.
- W2001990317 creator A5007927498 @default.
- W2001990317 creator A5063609596 @default.
- W2001990317 creator A5068849526 @default.
- W2001990317 creator A5072728675 @default.
- W2001990317 date "2000-05-01" @default.
- W2001990317 modified "2023-10-17" @default.
- W2001990317 title "Effect of oxygen plasma exposure of porous spin-on-glass films" @default.
- W2001990317 cites W1975039686 @default.
- W2001990317 cites W1979790889 @default.
- W2001990317 cites W1986945583 @default.
- W2001990317 cites W2032821943 @default.
- W2001990317 cites W2034028123 @default.
- W2001990317 cites W2036151830 @default.
- W2001990317 cites W2036919287 @default.
- W2001990317 cites W2053009172 @default.
- W2001990317 cites W2060723790 @default.
- W2001990317 cites W2118336613 @default.
- W2001990317 cites W2126547685 @default.
- W2001990317 cites W2944728552 @default.
- W2001990317 doi "https://doi.org/10.1116/1.591374" @default.
- W2001990317 hasPublicationYear "2000" @default.
- W2001990317 type Work @default.
- W2001990317 sameAs 2001990317 @default.
- W2001990317 citedByCount "75" @default.
- W2001990317 countsByYear W20019903172012 @default.
- W2001990317 countsByYear W20019903172013 @default.
- W2001990317 countsByYear W20019903172014 @default.
- W2001990317 countsByYear W20019903172015 @default.
- W2001990317 countsByYear W20019903172016 @default.
- W2001990317 countsByYear W20019903172018 @default.
- W2001990317 countsByYear W20019903172019 @default.
- W2001990317 countsByYear W20019903172021 @default.
- W2001990317 countsByYear W20019903172022 @default.
- W2001990317 crossrefType "journal-article" @default.
- W2001990317 hasAuthorship W2001990317A5007927498 @default.
- W2001990317 hasAuthorship W2001990317A5063609596 @default.
- W2001990317 hasAuthorship W2001990317A5068849526 @default.
- W2001990317 hasAuthorship W2001990317A5072728675 @default.
- W2001990317 hasConcept C105569014 @default.
- W2001990317 hasConcept C111368507 @default.
- W2001990317 hasConcept C121332964 @default.
- W2001990317 hasConcept C127313418 @default.
- W2001990317 hasConcept C127413603 @default.
- W2001990317 hasConcept C159985019 @default.
- W2001990317 hasConcept C176864760 @default.
- W2001990317 hasConcept C178790620 @default.
- W2001990317 hasConcept C185592680 @default.
- W2001990317 hasConcept C192562407 @default.
- W2001990317 hasConcept C2776139660 @default.
- W2001990317 hasConcept C2777289219 @default.
- W2001990317 hasConcept C42360764 @default.
- W2001990317 hasConcept C512968161 @default.
- W2001990317 hasConcept C521977710 @default.
- W2001990317 hasConcept C540031477 @default.
- W2001990317 hasConcept C62520636 @default.
- W2001990317 hasConcept C6648577 @default.
- W2001990317 hasConcept C82706917 @default.
- W2001990317 hasConceptScore W2001990317C105569014 @default.
- W2001990317 hasConceptScore W2001990317C111368507 @default.
- W2001990317 hasConceptScore W2001990317C121332964 @default.
- W2001990317 hasConceptScore W2001990317C127313418 @default.
- W2001990317 hasConceptScore W2001990317C127413603 @default.
- W2001990317 hasConceptScore W2001990317C159985019 @default.
- W2001990317 hasConceptScore W2001990317C176864760 @default.
- W2001990317 hasConceptScore W2001990317C178790620 @default.
- W2001990317 hasConceptScore W2001990317C185592680 @default.
- W2001990317 hasConceptScore W2001990317C192562407 @default.
- W2001990317 hasConceptScore W2001990317C2776139660 @default.
- W2001990317 hasConceptScore W2001990317C2777289219 @default.
- W2001990317 hasConceptScore W2001990317C42360764 @default.
- W2001990317 hasConceptScore W2001990317C512968161 @default.
- W2001990317 hasConceptScore W2001990317C521977710 @default.
- W2001990317 hasConceptScore W2001990317C540031477 @default.
- W2001990317 hasConceptScore W2001990317C62520636 @default.
- W2001990317 hasConceptScore W2001990317C6648577 @default.
- W2001990317 hasConceptScore W2001990317C82706917 @default.
- W2001990317 hasIssue "3" @default.
- W2001990317 hasLocation W20019903171 @default.
- W2001990317 hasOpenAccess W2001990317 @default.
- W2001990317 hasPrimaryLocation W20019903171 @default.
- W2001990317 hasRelatedWork W2082293200 @default.
- W2001990317 hasRelatedWork W2121036907 @default.
- W2001990317 hasRelatedWork W2137307547 @default.
- W2001990317 hasRelatedWork W2380293314 @default.
- W2001990317 hasRelatedWork W2783508775 @default.
- W2001990317 hasRelatedWork W2943188944 @default.
- W2001990317 hasRelatedWork W3008690834 @default.
- W2001990317 hasRelatedWork W3082440218 @default.
- W2001990317 hasRelatedWork W4242480814 @default.
- W2001990317 hasRelatedWork W4285802202 @default.
- W2001990317 hasVolume "18" @default.
- W2001990317 isParatext "false" @default.
- W2001990317 isRetracted "false" @default.
- W2001990317 magId "2001990317" @default.
- W2001990317 workType "article" @default.