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- W2002030894 abstract "The Monte Carlo program TRIM SP was used to determine sputtering yields and angular and energy distributions of sputtered particles. The influence of the inelastic energy loss model on the sputtering yield is shown to be of great importance. Agreement of the calculated results with experimental data is reasonably good, even in very detailed analysis." @default.
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- W2002030894 date "1984-03-01" @default.
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- W2002030894 title "Sputtering investigations with the Monte Carlo program TRIM SP" @default.
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