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- W2002036670 abstract "Chrome masks have traditionally been wet etched in an acidic solution of cerric ammonium nitrate. The etchant is commonly sprayed on the mask while the mask is slowly rotated, using an APT-914 or equivalent processor. While this process is well-understood, relatively trouble- free and inexpensive, the isotropic nature of wet etching results in an undercut of the chrome relative to the resist etch mask of approximately equals 150 nm per edge. Compensation for the undercut, in order to maintain control of the mean critical dimension (CD), is done by adjusting the printed feature size such that the undercut grows the printed feature to the desired final size. This sizing can be performed by manipulating the computer aided design database, which can be expensive and time consuming. In this paper, we present a comparison of wet and dry chrome etch processes using plates printed with the CORE-2564 in OCG-895 i resist. The differences in CD performance and resolution are illustrated." @default.
- W2002036670 created "2016-06-24" @default.
- W2002036670 creator A5042490524 @default.
- W2002036670 creator A5054791620 @default.
- W2002036670 date "1994-02-15" @default.
- W2002036670 modified "2023-09-24" @default.
- W2002036670 title "<title>Comparison of wet and dry chrome etching with the CORE-2564</title>" @default.
- W2002036670 doi "https://doi.org/10.1117/12.167247" @default.
- W2002036670 hasPublicationYear "1994" @default.
- W2002036670 type Work @default.
- W2002036670 sameAs 2002036670 @default.
- W2002036670 citedByCount "4" @default.
- W2002036670 countsByYear W20020366702012 @default.
- W2002036670 countsByYear W20020366702016 @default.
- W2002036670 countsByYear W20020366702019 @default.
- W2002036670 crossrefType "proceedings-article" @default.
- W2002036670 hasAuthorship W2002036670A5042490524 @default.
- W2002036670 hasAuthorship W2002036670A5054791620 @default.
- W2002036670 hasConcept C100460472 @default.
- W2002036670 hasConcept C120665830 @default.
- W2002036670 hasConcept C121332964 @default.
- W2002036670 hasConcept C127413603 @default.
- W2002036670 hasConcept C1291036 @default.
- W2002036670 hasConcept C159985019 @default.
- W2002036670 hasConcept C184050105 @default.
- W2002036670 hasConcept C192562407 @default.
- W2002036670 hasConcept C199639397 @default.
- W2002036670 hasConcept C2779227376 @default.
- W2002036670 hasConcept C2779292183 @default.
- W2002036670 hasConcept C53524968 @default.
- W2002036670 hasConceptScore W2002036670C100460472 @default.
- W2002036670 hasConceptScore W2002036670C120665830 @default.
- W2002036670 hasConceptScore W2002036670C121332964 @default.
- W2002036670 hasConceptScore W2002036670C127413603 @default.
- W2002036670 hasConceptScore W2002036670C1291036 @default.
- W2002036670 hasConceptScore W2002036670C159985019 @default.
- W2002036670 hasConceptScore W2002036670C184050105 @default.
- W2002036670 hasConceptScore W2002036670C192562407 @default.
- W2002036670 hasConceptScore W2002036670C199639397 @default.
- W2002036670 hasConceptScore W2002036670C2779227376 @default.
- W2002036670 hasConceptScore W2002036670C2779292183 @default.
- W2002036670 hasConceptScore W2002036670C53524968 @default.
- W2002036670 hasLocation W20020366701 @default.
- W2002036670 hasOpenAccess W2002036670 @default.
- W2002036670 hasPrimaryLocation W20020366701 @default.
- W2002036670 hasRelatedWork W1577680211 @default.
- W2002036670 hasRelatedWork W1993620123 @default.
- W2002036670 hasRelatedWork W2005920153 @default.
- W2002036670 hasRelatedWork W2060660172 @default.
- W2002036670 hasRelatedWork W2090008829 @default.
- W2002036670 hasRelatedWork W2549950089 @default.
- W2002036670 hasRelatedWork W2975304405 @default.
- W2002036670 hasRelatedWork W2999547713 @default.
- W2002036670 hasRelatedWork W3039634812 @default.
- W2002036670 hasRelatedWork W3177375295 @default.
- W2002036670 isParatext "false" @default.
- W2002036670 isRetracted "false" @default.
- W2002036670 magId "2002036670" @default.
- W2002036670 workType "article" @default.