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- W2002070007 abstract "A contactless and non-invasive optical interferometric method is used to study the temperature distribution and thermal time response in a GaAs micromachined power sensor. Temperature variations in the sensor active area-a cantilever beam—are sensed by an infrared laser beam. The temperature increase due to pulsed power dissipation in the cantilever induces an increase both in the GaAs refractive index and in the cantilever thickness. This results in a change in the phase and intensity of the reflected laser beam which is interferometrically detected. The spatial temperature distribution along the cantilever beam is studied using measurements of the optical phase and intensity as a function of the dissipated power. The optical signal is analysed taking into account Fabry-Perot interference. The thermal time constant of the sensor of about 5 msec is obtained from transient optical signal measurements. Results of the optical analysis are consistent with those of electrical characterization of the sensor and with the simulation of the temperature distribution." @default.
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- W2002070007 date "1998-04-01" @default.
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- W2002070007 title "Study of thermal effects in GaAs micromachined power sensor microsystems by an optical interferometer technique" @default.
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