Matches in SemOpenAlex for { <https://semopenalex.org/work/W2002079560> ?p ?o ?g. }
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- W2002079560 endingPage "194" @default.
- W2002079560 startingPage "188" @default.
- W2002079560 abstract "A novel and simple technology for making robust three-dimensional (3D) silicon structures with small radii of bending has been developed and investigated. The proposed self-assembly method of bending 3D structures out of plane such that they stay bent without any interlocking braces is based on thermal shrinkage of polyimide in V-grooves. A wide range of bending angles for the permanent out-of-plane rotated structure can be chosen by varying the curing temperature of the polyimide. The relatively large thermal expansion of polyimide makes it possible to use the structure in a dynamic mode useful for compensation of undesired process variations. The proposed technique is compatible with both IC based surface micromachining and batch fabrication. Therefore, structures based on the new polyimide joint have general applications in micromachining and can be used in many new 3D sensors or actuators having detailed features in all three dimensions." @default.
- W2002079560 created "2016-06-24" @default.
- W2002079560 creator A5017089023 @default.
- W2002079560 creator A5042177405 @default.
- W2002079560 creator A5043782835 @default.
- W2002079560 date "1998-09-01" @default.
- W2002079560 modified "2023-09-30" @default.
- W2002079560 title "New small radius joints based on thermal shrinkage of polyimide in V-grooves for robust self-assembly 3D microstructures" @default.
- W2002079560 cites W2012241126 @default.
- W2002079560 cites W2092139036 @default.
- W2002079560 cites W2118957466 @default.
- W2002079560 cites W2129283189 @default.
- W2002079560 cites W2173208407 @default.
- W2002079560 cites W4252633298 @default.
- W2002079560 doi "https://doi.org/10.1088/0960-1317/8/3/003" @default.
- W2002079560 hasPublicationYear "1998" @default.
- W2002079560 type Work @default.
- W2002079560 sameAs 2002079560 @default.
- W2002079560 citedByCount "48" @default.
- W2002079560 countsByYear W20020795602013 @default.
- W2002079560 countsByYear W20020795602015 @default.
- W2002079560 countsByYear W20020795602016 @default.
- W2002079560 countsByYear W20020795602018 @default.
- W2002079560 countsByYear W20020795602019 @default.
- W2002079560 countsByYear W20020795602020 @default.
- W2002079560 countsByYear W20020795602022 @default.
- W2002079560 crossrefType "journal-article" @default.
- W2002079560 hasAuthorship W2002079560A5017089023 @default.
- W2002079560 hasAuthorship W2002079560A5042177405 @default.
- W2002079560 hasAuthorship W2002079560A5043782835 @default.
- W2002079560 hasConcept C127413603 @default.
- W2002079560 hasConcept C136525101 @default.
- W2002079560 hasConcept C138211643 @default.
- W2002079560 hasConcept C142724271 @default.
- W2002079560 hasConcept C145667562 @default.
- W2002079560 hasConcept C159985019 @default.
- W2002079560 hasConcept C161690185 @default.
- W2002079560 hasConcept C180145272 @default.
- W2002079560 hasConcept C192562407 @default.
- W2002079560 hasConcept C204787440 @default.
- W2002079560 hasConcept C2778844933 @default.
- W2002079560 hasConcept C2779227376 @default.
- W2002079560 hasConcept C2780965675 @default.
- W2002079560 hasConcept C71924100 @default.
- W2002079560 hasConcept C78519656 @default.
- W2002079560 hasConcept C87210426 @default.
- W2002079560 hasConceptScore W2002079560C127413603 @default.
- W2002079560 hasConceptScore W2002079560C136525101 @default.
- W2002079560 hasConceptScore W2002079560C138211643 @default.
- W2002079560 hasConceptScore W2002079560C142724271 @default.
- W2002079560 hasConceptScore W2002079560C145667562 @default.
- W2002079560 hasConceptScore W2002079560C159985019 @default.
- W2002079560 hasConceptScore W2002079560C161690185 @default.
- W2002079560 hasConceptScore W2002079560C180145272 @default.
- W2002079560 hasConceptScore W2002079560C192562407 @default.
- W2002079560 hasConceptScore W2002079560C204787440 @default.
- W2002079560 hasConceptScore W2002079560C2778844933 @default.
- W2002079560 hasConceptScore W2002079560C2779227376 @default.
- W2002079560 hasConceptScore W2002079560C2780965675 @default.
- W2002079560 hasConceptScore W2002079560C71924100 @default.
- W2002079560 hasConceptScore W2002079560C78519656 @default.
- W2002079560 hasConceptScore W2002079560C87210426 @default.
- W2002079560 hasIssue "3" @default.
- W2002079560 hasLocation W20020795601 @default.
- W2002079560 hasOpenAccess W2002079560 @default.
- W2002079560 hasPrimaryLocation W20020795601 @default.
- W2002079560 hasRelatedWork W2024799524 @default.
- W2002079560 hasRelatedWork W2037964280 @default.
- W2002079560 hasRelatedWork W2139946745 @default.
- W2002079560 hasRelatedWork W2165377826 @default.
- W2002079560 hasRelatedWork W2383467036 @default.
- W2002079560 hasRelatedWork W2593200884 @default.
- W2002079560 hasRelatedWork W2744931849 @default.
- W2002079560 hasRelatedWork W3133496570 @default.
- W2002079560 hasRelatedWork W3178223034 @default.
- W2002079560 hasRelatedWork W2090724378 @default.
- W2002079560 hasVolume "8" @default.
- W2002079560 isParatext "false" @default.
- W2002079560 isRetracted "false" @default.
- W2002079560 magId "2002079560" @default.
- W2002079560 workType "article" @default.