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- W2002100122 abstract "Excimer laser lithography combined with chemically amplified resists offers a viable approach to lithography at 0.5 micrometers and below. APEX-E, a positive tone deep-uv resist used in conjunction with a 0.44 NA excimer laser stepper is capable of 0.35 micrometers resolution. To improve the process window for this resist while reducing the performance variability, the Taguchi method of quality control was employed. The baseline process for APEX-E was characterized, then subsequently used as a comparison to the optimized process as suggested by the Taguchi experiments." @default.
- W2002100122 created "2016-06-24" @default.
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- W2002100122 date "1993-08-04" @default.
- W2002100122 modified "2023-09-23" @default.
- W2002100122 title "Process optimization of APEX-E" @default.
- W2002100122 doi "https://doi.org/10.1117/12.148936" @default.
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