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- W2002113710 abstract "Satellite defects are found on wafer surface after development of photo-resist in photolithograph process. We present advanced TOF-SIMS and XPS analysis together with the process investigation to reveal the formation mechanism of the defects." @default.
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- W2002113710 date "2013-07-01" @default.
- W2002113710 modified "2023-09-25" @default.
- W2002113710 title "Analysis of satellite defects formed in photolithograph process by TOF-SIMS and XPS" @default.
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- W2002113710 doi "https://doi.org/10.1109/ipfa.2013.6599170" @default.
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