FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2002137182> ?p ?o ?g. }

• W2002137182 endingPage "035003" @default.
• W2002137182 startingPage "035003" @default.
• W2002137182 abstract "The recently developed alumina and Parylene C bi-layer encapsulation improved the lifetime of neural interfaces. Tip deinsulation of Utah electrode array based neural interfaces is challenging due to the complex 3D geometries and high aspect ratios of the devices. A three-step self-aligned process was developed for tip deinsulation of bilayer encapsulated arrays. The deinsulation process utilizes laser ablation to remove Parylene C, O2 reactive ion etching to remove carbon and Parylene residues, and buffered oxide etch to remove alumina deposited by atomic layer deposition, and expose the IrOx tip metallization. The deinsulated iridium oxide area was characterized by scanning electron microscopy, atomic force microscopy, X-ray photoelectron spectroscopy, and electrochemical impedance spectroscopy to determine the morphology, surface morphology, composition, and electrical properties of the deposited layers and deinsulated tips. The alumina layer was found to prevent the formation of micro cracks on iridium oxide during the laser ablation process, which has been previously reported as a challenge for laser deinsulation of Parylene films. The charge injection capacity, charge storage capacity, and impedance of deinsulated iridium oxide were characterized to determine the deinsulation efficacy compared to Parylene-only insulation. Deinsulated iridium oxide with bilayer encapsulation had higher charge injection capacity (240 vs 320 nC) and similar electrochemical impedance (2.5 vs 2.5 kΩ) compared to deinsulated iridium oxide with only Parylene coating for an area of 2 × 10-4 cm2. Tip impedances were in the ranges of 20 to 50 kΩ, with median of 32 KΩ and standard deviation of 30 kΩ, showing the effectiveness of the self-aligned deinsulation process for alumina and Parylene C bi-layer encapsulation. The relatively uniform tip impedance values demonstrated the consistency of tip exposures." @default.
• W2002137182 created "2016-06-24" @default.
• W2002137182 creator A5002013567 @default.
• W2002137182 creator A5016859648 @default.
• W2002137182 creator A5033678414 @default.
• W2002137182 creator A5034696174 @default.
• W2002137182 creator A5050780244 @default.
• W2002137182 creator A5057987906 @default.
• W2002137182 creator A5079803960 @default.
• W2002137182 creator A5085169136 @default.
• W2002137182 date "2014-02-04" @default.
• W2002137182 modified "2023-09-25" @default.
• W2002137182 title "Self-aligned tip deinsulation of atomic layer deposited Al2O3and parylene C coated Utah electrode array based neural interfaces" @default.
• W2002137182 cites W1619983015 @default.
• W2002137182 cites W1969213762 @default.
• W2002137182 cites W1971748995 @default.
• W2002137182 cites W1973701820 @default.
• W2002137182 cites W1974894886 @default.
• W2002137182 cites W1984671579 @default.
• W2002137182 cites W1989542161 @default.
• W2002137182 cites W1991326578 @default.
• W2002137182 cites W1995326391 @default.
• W2002137182 cites W1997904336 @default.
• W2002137182 cites W2000577838 @default.
• W2002137182 cites W2006139900 @default.
• W2002137182 cites W2019107712 @default.
• W2002137182 cites W2026206048 @default.
• W2002137182 cites W2026417226 @default.
• W2002137182 cites W2028833591 @default.
• W2002137182 cites W2030786835 @default.
• W2002137182 cites W2035425979 @default.
• W2002137182 cites W2035704191 @default.
• W2002137182 cites W2036863685 @default.
• W2002137182 cites W2042639686 @default.
• W2002137182 cites W2047914290 @default.
• W2002137182 cites W2070058744 @default.
• W2002137182 cites W2085311892 @default.
• W2002137182 cites W2086003589 @default.
• W2002137182 cites W2091895272 @default.
• W2002137182 cites W2095246357 @default.
• W2002137182 cites W2111937020 @default.
• W2002137182 cites W2118043312 @default.
• W2002137182 cites W2132906099 @default.
• W2002137182 cites W2134458940 @default.
• W2002137182 cites W2135918081 @default.
• W2002137182 cites W2140774760 @default.
• W2002137182 cites W2149476088 @default.
• W2002137182 cites W2152476177 @default.
• W2002137182 cites W2169761535 @default.
• W2002137182 cites W2491366246 @default.
• W2002137182 doi "https://doi.org/10.1088/0960-1317/24/3/035003" @default.
• W2002137182 hasPubMedCentralId "https://www.ncbi.nlm.nih.gov/pmc/articles/3994722" @default.
• W2002137182 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/24771981" @default.
• W2002137182 hasPublicationYear "2014" @default.
• W2002137182 type Work @default.
• W2002137182 sameAs 2002137182 @default.
• W2002137182 citedByCount "8" @default.
• W2002137182 countsByYear W20021371822014 @default.
• W2002137182 countsByYear W20021371822015 @default.
• W2002137182 countsByYear W20021371822018 @default.
• W2002137182 countsByYear W20021371822019 @default.
• W2002137182 countsByYear W20021371822020 @default.
• W2002137182 countsByYear W20021371822021 @default.
• W2002137182 countsByYear W20021371822022 @default.
• W2002137182 crossrefType "journal-article" @default.
• W2002137182 hasAuthorship W2002137182A5002013567 @default.
• W2002137182 hasAuthorship W2002137182A5016859648 @default.
• W2002137182 hasAuthorship W2002137182A5033678414 @default.
• W2002137182 hasAuthorship W2002137182A5034696174 @default.
• W2002137182 hasAuthorship W2002137182A5050780244 @default.
• W2002137182 hasAuthorship W2002137182A5057987906 @default.
• W2002137182 hasAuthorship W2002137182A5079803960 @default.
• W2002137182 hasAuthorship W2002137182A5085169136 @default.
• W2002137182 hasBestOaLocation W20021371822 @default.
• W2002137182 hasConcept C113196181 @default.
• W2002137182 hasConcept C120665830 @default.
• W2002137182 hasConcept C121332964 @default.
• W2002137182 hasConcept C127413603 @default.
• W2002137182 hasConcept C147789679 @default.
• W2002137182 hasConcept C159985019 @default.
• W2002137182 hasConcept C161790260 @default.
• W2002137182 hasConcept C171250308 @default.
• W2002137182 hasConcept C17525397 @default.
• W2002137182 hasConcept C175708663 @default.
• W2002137182 hasConcept C185592680 @default.
• W2002137182 hasConcept C191897082 @default.
• W2002137182 hasConcept C192157962 @default.
• W2002137182 hasConcept C192562407 @default.
• W2002137182 hasConcept C26771246 @default.
• W2002137182 hasConcept C2777385008 @default.
• W2002137182 hasConcept C2779188808 @default.
• W2002137182 hasConcept C2779227376 @default.
• W2002137182 hasConcept C2779851234 @default.
• W2002137182 hasConcept C41625074 @default.
• W2002137182 hasConcept C42360764 @default.
• W2002137182 hasConcept C43617362 @default.
• W2002137182 hasConcept C520434653 @default.
• W2002137182 hasConcept C521977710 @default.

• next