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- W2002140844 abstract "Abstract Moving boundary corrections to the epitaxial growth by step flow (BCF theory) are calculated. It is supposed that the only surface irregularities are misorientation steps. The growth rate as a function of step distance, impingement current and temperature is calculated. A criterion for the validity of the BCF theory has been found on the basis of the adatom coverage at the surface. It is shown that under high supersaturation the coverage depends strongly on the moving boundary." @default.
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- W2002140844 date "1986-04-01" @default.
- W2002140844 modified "2023-10-07" @default.
- W2002140844 title "High supersaturation layer-by-layer growth: Application to Si MBE" @default.
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- W2002140844 doi "https://doi.org/10.1016/0022-0248(86)90207-1" @default.
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