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- W2002158180 abstract "Abstract In this paper results are presented which, for the first time, demonstrate the use of Ge as a via hole filling material in Si technology. Low-temperature LPCVD of germanium using high-purity reactive, carrier and purge gases is found to be highly Si/SiO 2 selective with the ability to produce heteroepitaxial films. These features are utilized to fill up contact holes with germanium, achieving a high degree of planarization. Connected to an aluminum metallization through a poly-Si layer, which is deposited in situ right after the germanium, the resistivities of such connections containing Ge plugs are tested in Kelvin structures on P-doped and B-doped single crystal Si as well as on P-doped poly-Si. The results show that the resistance values depend strongly on the doping of the Ge bulk. For annealing temperatures between 800°C and 850°C, however, contact resistivities comparable to poly-Si can be obtained. Furthermore the selectivity deposited Ge plugs are tested with respect to their gettering and diffusion source capabilities in Ge-contacted Si diodes. Good quality p-n junctions can be produced. All results show comparability with conventional Si technology and reveal new applications for Ge CVD in low-temperature VLSI processing." @default.
- W2002158180 created "2016-06-24" @default.
- W2002158180 creator A5011021217 @default.
- W2002158180 creator A5012163852 @default.
- W2002158180 creator A5038147111 @default.
- W2002158180 creator A5046734152 @default.
- W2002158180 creator A5010213443 @default.
- W2002158180 date "1991-01-01" @default.
- W2002158180 modified "2023-09-27" @default.
- W2002158180 title "Selective CVD of germanium on silicon and its applications" @default.
- W2002158180 cites W1977894028 @default.
- W2002158180 cites W2008465994 @default.
- W2002158180 cites W2026257039 @default.
- W2002158180 cites W2045417153 @default.
- W2002158180 cites W2047378549 @default.
- W2002158180 cites W2054307419 @default.
- W2002158180 cites W2059813681 @default.
- W2002158180 cites W2074845469 @default.
- W2002158180 cites W2083177328 @default.
- W2002158180 cites W2087037537 @default.
- W2002158180 cites W2169917518 @default.
- W2002158180 cites W3021238137 @default.
- W2002158180 doi "https://doi.org/10.1016/0042-207x(91)90035-h" @default.
- W2002158180 hasPublicationYear "1991" @default.
- W2002158180 type Work @default.
- W2002158180 sameAs 2002158180 @default.
- W2002158180 citedByCount "4" @default.
- W2002158180 countsByYear W20021581802012 @default.
- W2002158180 countsByYear W20021581802017 @default.
- W2002158180 crossrefType "journal-article" @default.
- W2002158180 hasAuthorship W2002158180A5010213443 @default.
- W2002158180 hasAuthorship W2002158180A5011021217 @default.
- W2002158180 hasAuthorship W2002158180A5012163852 @default.
- W2002158180 hasAuthorship W2002158180A5038147111 @default.
- W2002158180 hasAuthorship W2002158180A5046734152 @default.
- W2002158180 hasConcept C113196181 @default.
- W2002158180 hasConcept C123671423 @default.
- W2002158180 hasConcept C171250308 @default.
- W2002158180 hasConcept C185592680 @default.
- W2002158180 hasConcept C191897082 @default.
- W2002158180 hasConcept C192562407 @default.
- W2002158180 hasConcept C2777855556 @default.
- W2002158180 hasConcept C2779227376 @default.
- W2002158180 hasConcept C43617362 @default.
- W2002158180 hasConcept C49040817 @default.
- W2002158180 hasConcept C544956773 @default.
- W2002158180 hasConcept C550623735 @default.
- W2002158180 hasConcept C57410435 @default.
- W2002158180 hasConcept C57863236 @default.
- W2002158180 hasConceptScore W2002158180C113196181 @default.
- W2002158180 hasConceptScore W2002158180C123671423 @default.
- W2002158180 hasConceptScore W2002158180C171250308 @default.
- W2002158180 hasConceptScore W2002158180C185592680 @default.
- W2002158180 hasConceptScore W2002158180C191897082 @default.
- W2002158180 hasConceptScore W2002158180C192562407 @default.
- W2002158180 hasConceptScore W2002158180C2777855556 @default.
- W2002158180 hasConceptScore W2002158180C2779227376 @default.
- W2002158180 hasConceptScore W2002158180C43617362 @default.
- W2002158180 hasConceptScore W2002158180C49040817 @default.
- W2002158180 hasConceptScore W2002158180C544956773 @default.
- W2002158180 hasConceptScore W2002158180C550623735 @default.
- W2002158180 hasConceptScore W2002158180C57410435 @default.
- W2002158180 hasConceptScore W2002158180C57863236 @default.
- W2002158180 hasLocation W20021581801 @default.
- W2002158180 hasOpenAccess W2002158180 @default.
- W2002158180 hasPrimaryLocation W20021581801 @default.
- W2002158180 hasRelatedWork W1985562555 @default.
- W2002158180 hasRelatedWork W1994632003 @default.
- W2002158180 hasRelatedWork W2012947360 @default.
- W2002158180 hasRelatedWork W2015443796 @default.
- W2002158180 hasRelatedWork W2031414919 @default.
- W2002158180 hasRelatedWork W2050172815 @default.
- W2002158180 hasRelatedWork W2064030834 @default.
- W2002158180 hasRelatedWork W2071675601 @default.
- W2002158180 hasRelatedWork W2192899966 @default.
- W2002158180 hasRelatedWork W2266294095 @default.
- W2002158180 hasRelatedWork W2375505746 @default.
- W2002158180 hasRelatedWork W2412116727 @default.
- W2002158180 hasRelatedWork W2783270481 @default.
- W2002158180 hasRelatedWork W2803212712 @default.
- W2002158180 hasRelatedWork W2907330489 @default.
- W2002158180 hasRelatedWork W2982557864 @default.
- W2002158180 hasRelatedWork W3022401716 @default.
- W2002158180 hasRelatedWork W3080794459 @default.
- W2002158180 hasRelatedWork W3088278096 @default.
- W2002158180 hasRelatedWork W3118950627 @default.
- W2002158180 isParatext "false" @default.
- W2002158180 isRetracted "false" @default.
- W2002158180 magId "2002158180" @default.
- W2002158180 workType "article" @default.