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- W2002166435 abstract "Curves for the uniformity in film thickness on spherical substrates are drawn for various geometries. The optimum source-to-substrate height for maximum uniformity of the film thickness is determined. These data are approximated to achieve uniform thickness on a large number of small planar substrates loaded on a large spherical substrate holder, the appropriate geometry being selected on the basis of the radius of curvature of the substrate holder." @default.
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- W2002166435 date "1979-02-01" @default.
- W2002166435 modified "2023-09-27" @default.
- W2002166435 title "On the uniformity of film thickness on rotating spherical substrates on a planar work holder" @default.
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- W2002166435 doi "https://doi.org/10.1016/0040-6090(79)90139-1" @default.
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