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- W2002177587 abstract "A wear-resistant titanium-nitride film was successfully formed on the commercial superalloy INCONEL 718 with a plasma source ion-implantation unit operated in the ion-beam enhanced-deposition mode. The process was carried out at ambient temperature by alternately depositing titanium with a dc cathode sputter source followed by nitrogen implantation utilizing a plasma. Auger spectroscopy was used to determine the composition-depth profile of the surface film. Transmission electron microscopy indicated the film to be adherent and fine-grained. Tribological property improvements are attributed to both higher hardness and lower coefficient of friction of the titanium-nitride film." @default.
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- W2002177587 date "1991-05-01" @default.
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- W2002177587 title "Ion beam enhanced deposition of titanium-nitride on INCONEL 718" @default.
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- W2002177587 doi "https://doi.org/10.1016/0025-5408(91)90050-v" @default.
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