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• W2002178743 abstract "The dielectric properties of porous anodic Al2O3 film can change significantly with the adsorption of moisture by the film. This phenomenon can explain the large variations in capacitance and resistance of the Al2O3 humidity sensors observed experimentally. In this paper, we propose a theory of the sensor based on the structure of the porous dielectric, the adsorption mechanisms and the effect of semi-conducting inclusions in an insulator. We show that the sensor characteristics are controlled by the macropores in the porous Al2O3 film. The role of incipient pores and intercrystallite regions is of secondary importance. The theoretical capacitance and resistance characteristics computed from this analysis agree well with the experimental behaviour." @default.
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• W2002178743 date "1984-05-01" @default.
• W2002178743 modified "2023-09-25" @default.
• W2002178743 title "Effect of moisture on the dielectric properties of porous alumina films" @default.
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• W2002178743 doi "https://doi.org/10.1016/0250-6874(84)80009-8" @default.
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