FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2002182145> ?p ?o ?g. }

• W2002182145 abstract "Newly designed magnetron sputtering system called the toroidal magnetron sputtering (TMS) system was developed and evaluated to decrease the damage of thin films surface. On the basis of magnetic field simulation, it was constructed and debugged for the plasma generation of high ionization rate near a target surface. Magnetic field distributions were measured by a magnetic field measurement probe. Auxiliary magnets were added by means of the magnetic field simulation at the corners of the TMS source. As a result, the TMS source could be operated at lower voltage. In the case of the TMS source with the auxiliary magnets, the sputtering yield times the target current density also increased at the same DC power. In this study, we investigated the possibility of employing the TMS system for thin films deposition." @default.
• W2002182145 created "2016-06-24" @default.
• W2002182145 creator A5040788831 @default.
• W2002182145 creator A5055930114 @default.
• W2002182145 creator A5059192925 @default.
• W2002182145 creator A5068048448 @default.
• W2002182145 creator A5071918935 @default.
• W2002182145 creator A5074896786 @default.
• W2002182145 creator A5076132049 @default.
• W2002182145 date "2010-09-01" @default.
• W2002182145 modified "2023-09-26" @default.
• W2002182145 title "Development and characterization of toroidal magnetron sputtering system for thin films deposition" @default.
• W2002182145 cites W1978452446 @default.
• W2002182145 cites W2012167558 @default.
• W2002182145 cites W2015196026 @default.
• W2002182145 cites W2033816683 @default.
• W2002182145 cites W2046475873 @default.
• W2002182145 cites W2055046817 @default.
• W2002182145 cites W2094491269 @default.
• W2002182145 cites W2108454416 @default.
• W2002182145 cites W2164788134 @default.
• W2002182145 doi "https://doi.org/10.1016/j.tsf.2010.03.145" @default.
• W2002182145 hasPublicationYear "2010" @default.
• W2002182145 type Work @default.
• W2002182145 sameAs 2002182145 @default.
• W2002182145 citedByCount "1" @default.
• W2002182145 countsByYear W20021821452021 @default.
• W2002182145 crossrefType "journal-article" @default.
• W2002182145 hasAuthorship W2002182145A5040788831 @default.
• W2002182145 hasAuthorship W2002182145A5055930114 @default.
• W2002182145 hasAuthorship W2002182145A5059192925 @default.
• W2002182145 hasAuthorship W2002182145A5068048448 @default.
• W2002182145 hasAuthorship W2002182145A5071918935 @default.
• W2002182145 hasAuthorship W2002182145A5074896786 @default.
• W2002182145 hasAuthorship W2002182145A5076132049 @default.
• W2002182145 hasConcept C113196181 @default.
• W2002182145 hasConcept C115260700 @default.
• W2002182145 hasConcept C116515362 @default.
• W2002182145 hasConcept C119599485 @default.
• W2002182145 hasConcept C121332964 @default.
• W2002182145 hasConcept C123408415 @default.
• W2002182145 hasConcept C127413603 @default.
• W2002182145 hasConcept C15001198 @default.
• W2002182145 hasConcept C151730666 @default.
• W2002182145 hasConcept C16389437 @default.
• W2002182145 hasConcept C171250308 @default.
• W2002182145 hasConcept C185544564 @default.
• W2002182145 hasConcept C185592680 @default.
• W2002182145 hasConcept C19067145 @default.
• W2002182145 hasConcept C192562407 @default.
• W2002182145 hasConcept C22423302 @default.
• W2002182145 hasConcept C2816523 @default.
• W2002182145 hasConcept C43617362 @default.
• W2002182145 hasConcept C46141821 @default.
• W2002182145 hasConcept C49040817 @default.
• W2002182145 hasConcept C61427134 @default.
• W2002182145 hasConcept C62520636 @default.
• W2002182145 hasConcept C64297162 @default.
• W2002182145 hasConcept C82706917 @default.
• W2002182145 hasConcept C86803240 @default.
• W2002182145 hasConceptScore W2002182145C113196181 @default.
• W2002182145 hasConceptScore W2002182145C115260700 @default.
• W2002182145 hasConceptScore W2002182145C116515362 @default.
• W2002182145 hasConceptScore W2002182145C119599485 @default.
• W2002182145 hasConceptScore W2002182145C121332964 @default.
• W2002182145 hasConceptScore W2002182145C123408415 @default.
• W2002182145 hasConceptScore W2002182145C127413603 @default.
• W2002182145 hasConceptScore W2002182145C15001198 @default.
• W2002182145 hasConceptScore W2002182145C151730666 @default.
• W2002182145 hasConceptScore W2002182145C16389437 @default.
• W2002182145 hasConceptScore W2002182145C171250308 @default.
• W2002182145 hasConceptScore W2002182145C185544564 @default.
• W2002182145 hasConceptScore W2002182145C185592680 @default.
• W2002182145 hasConceptScore W2002182145C19067145 @default.
• W2002182145 hasConceptScore W2002182145C192562407 @default.
• W2002182145 hasConceptScore W2002182145C22423302 @default.
• W2002182145 hasConceptScore W2002182145C2816523 @default.
• W2002182145 hasConceptScore W2002182145C43617362 @default.
• W2002182145 hasConceptScore W2002182145C46141821 @default.
• W2002182145 hasConceptScore W2002182145C49040817 @default.
• W2002182145 hasConceptScore W2002182145C61427134 @default.
• W2002182145 hasConceptScore W2002182145C62520636 @default.
• W2002182145 hasConceptScore W2002182145C64297162 @default.
• W2002182145 hasConceptScore W2002182145C82706917 @default.
• W2002182145 hasConceptScore W2002182145C86803240 @default.
• W2002182145 hasLocation W20021821451 @default.
• W2002182145 hasOpenAccess W2002182145 @default.
• W2002182145 hasPrimaryLocation W20021821451 @default.
• W2002182145 hasRelatedWork W1978620629 @default.
• W2002182145 hasRelatedWork W1990905515 @default.
• W2002182145 hasRelatedWork W1999461152 @default.
• W2002182145 hasRelatedWork W2016798698 @default.
• W2002182145 hasRelatedWork W2036188750 @default.
• W2002182145 hasRelatedWork W2071503497 @default.
• W2002182145 hasRelatedWork W2084461123 @default.
• W2002182145 hasRelatedWork W2265439006 @default.
• W2002182145 hasRelatedWork W2820047385 @default.
• W2002182145 hasRelatedWork W2821285605 @default.
• W2002182145 hasRelatedWork W2844200480 @default.
• W2002182145 hasRelatedWork W2861608126 @default.

• next