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- W2002185373 abstract "It has been observed that ion implantation into Ge at room temperature creates severe surface craters extending several thousand angstroms into the surface, and results in the incorporation of large quantities of C and O impurities (∼50 impurities/ion). This effect has a strong temperature dependence and essentially disappears for implantations performed at liquid nitrogen temperature. The systematics of this effect are presented, preliminary annealing results are cited, and possible mechanisms are discussed." @default.
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- W2002185373 date "1982-10-15" @default.
- W2002185373 modified "2023-10-09" @default.
- W2002185373 title "Characterization of damage in ion implanted Ge" @default.
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- W2002185373 doi "https://doi.org/10.1063/1.93643" @default.
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