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- W2002186688 abstract "The laser annealing of Ge/Si heterostructures with Ge quantum dots (QD's) embedded on the depth of 0.15 and 0.3 μmhas been studied. The samples were irradiated by 80-nanosecond ruby laser pulses. Irradiation energy density was closeto the melting threshold of Si surface. The nanocluster structure was analyzed by Raman spectroscopy. Changes incomposition of QD's were observed for both types of samples. The decrease in dispersion of nanocluster sizes after laserirradiation was obtained for samples with QD's embedded on 0.3 μm depth. The numerical simulations on the basis ofStefan problem showed that the maximum temperatures on the depth of QD's bedding differ by ~ 100 K. This differenceis likely to lead to different effects of laser annealing of heterostructures with QD's." @default.
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- W2002186688 date "2008-05-08" @default.
- W2002186688 modified "2023-09-23" @default.
- W2002186688 title "Influence of pulsed laser annealing on the properties of Ge quantum dots in Si matrix" @default.
- W2002186688 doi "https://doi.org/10.1117/12.782601" @default.
- W2002186688 hasPublicationYear "2008" @default.
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