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- W2002188889 abstract "The first in-situ x-ray monitoring was applied for superthin (20-250 A) diamond-like carbon (DLC) films investigation. The film thickness, density, roughness, and growth rate were calculated from reflectivity measurements during deposition and etching processes. The objects of in-situ investigations were DLC films obtained by RF-method in C6H12+Ar and C6H12+N2 mixtures on silicon substrates. The results of an investigation reveal that the roughness and the density of DLC films were varied at early stages. It was shown that obtained results can be explained by island mechanism of DLC films growth. It was shown that in-situ x-ray monitoring system permits us to examine the ultra thin layers and also to carry out the diagnostic of transient processes as the deposition conditions changes.© (1995) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only." @default.
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- W2002188889 date "1995-06-15" @default.
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- W2002188889 title "Real-time monitoring of diamond-like film growth by x-ray diffraction" @default.
- W2002188889 doi "https://doi.org/10.1117/12.211894" @default.
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