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- W2002201108 abstract "P/Be and Ar/Be dual implantations were performed into In0.53Ga0.47As. Significantly higher Be dopant activation was obtained for P/Be dual implantation compared to Be implantation. Lower dopant activation was obtained for Ar/Be dual implantation. Be in-diffusion during annealing is reduced for both P/Be and Ar/Be dual implantations." @default.
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- W2002201108 date "1990-10-01" @default.
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- W2002201108 title "Dual implants in InGaAs" @default.
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- W2002201108 doi "https://doi.org/10.1063/1.346298" @default.
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