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- W2002202893 abstract "We describe statistical analysis of AFM measurements of bump size, shape and position on DVD stampers. We present statistical concepts that lead to useful measurements of process position and process noise. These physical measurements are compared with key electrical measurements such as asymmetry and jitter." @default.
- W2002202893 created "2016-06-24" @default.
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- W2002202893 date "2002-01-15" @default.
- W2002202893 modified "2023-09-23" @default.
- W2002202893 title "<title>AFM length analysis of data marks: measuring jitter, asymmetry, process noise, and process position</title>" @default.
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- W2002202893 doi "https://doi.org/10.1117/12.453421" @default.
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