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- W2002258093 abstract "Pore formation is considered on the interface between a metal film and upper silicon layer in silicon-on-insulator (SOI) structures under high temperature conditions. It is assumed that the interface transmits silicon self–interstitials and collects vacancies, which results in the vacancy-related defect formation. The role of the buried insulator as a diffusion barrier for point defects is discussed. It is shown that vacancy pileup on the metal–silicon layer interface depends on the deformation introduced in the silicon layer by both the metal film and buried insulator. A metallization technique based on multicomponent amorphous metal films is shown to produce long-life SOI-based devices." @default.
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- W2002258093 date "1998-06-15" @default.
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- W2002258093 title "Pore formation on the silicon–metal interface in silicon–on–insulator structures" @default.
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