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- W2002258853 abstract "For water cooLing ultra-precision planar motor used for Lithography equipment, transient and steady thermal analyses are effectiveness to predict the temperature distribution and requirement on the water cooLing system. This paper investigates calculating the couple field of temperature field and fluid field of ultra-precision planar motor through 3D finite-element analysis (FEA). The analysis result provides foundation for improving motor performance, structural optimization as well as the design of cooLing system." @default.
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- W2002258853 date "2011-08-01" @default.
- W2002258853 modified "2023-09-25" @default.
- W2002258853 title "Calculation and Analysis of Temperature Field for Planar Motor Based on 3D FEM" @default.
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- W2002258853 doi "https://doi.org/10.1109/icdma.2011.74" @default.
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