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- W2002304670 abstract "This letter investigates the high-frequency performance of trigate polycrystalline silicon thin-film transistors (poly-Si TFTs) using low temperature microwave annealing (MWA). MWA exhibits sufficient dopant activation efficiency, good short channel effect control, and a higher maximum oscillation frequency (f <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>max</sub> ) of poly-Si TFTs than does rapid thermal annealing. In addition, MWA can fabricate nanoscale devices. Poly-Si TFTs with short channel annealed by microwave reveals better high-frequency performance and switching characteristics." @default.
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- W2002304670 date "2015-04-01" @default.
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- W2002304670 title "High-Frequency Performance of Trigate Poly-Si Thin-Film Transistors by Microwave Annealing" @default.
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- W2002304670 doi "https://doi.org/10.1109/led.2015.2399498" @default.
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