Matches in SemOpenAlex for { <https://semopenalex.org/work/W2002314183> ?p ?o ?g. }
- W2002314183 abstract "Abstract A hot-cathode plasma sputtering technique was used to fabricate highly transparent and conducting aluminum-doped zinc oxide (AZO) films on glass substrates from disk shaped AZO (Al2O3: 5 wt.% and 2 wt.%) targets. Using a target voltage VT = −200 V and plasma excitation pressure PAr = 1.5 × 10−3 Torr, the lowest resistivity of 4.0 × 10−4 Ω cm was obtained at 400 nm with a carrier density of 8.7 × 1020 cm−3 and a Hall mobility of 17 cm2/V s. The analyzed structural properties of these films revealed that this lower resistivity was due to a decrease in the lattice spacing d(0 0 2) of the (0 0 2) plane parallel to the substrate surface. This decrease in lattice spacing was presumably caused by oxygen vacancies acting as an effective source of carrier electrons." @default.
- W2002314183 created "2016-06-24" @default.
- W2002314183 creator A5049015358 @default.
- W2002314183 creator A5065766706 @default.
- W2002314183 date "2009-06-01" @default.
- W2002314183 modified "2023-09-26" @default.
- W2002314183 title "Electrical properties of Al-doped ZnO films fabricated by a hot-cathode plasma sputtering method" @default.
- W2002314183 cites W1979496920 @default.
- W2002314183 cites W1983641477 @default.
- W2002314183 cites W1993646616 @default.
- W2002314183 cites W1997874271 @default.
- W2002314183 cites W2013035986 @default.
- W2002314183 cites W2020207259 @default.
- W2002314183 cites W2021366495 @default.
- W2002314183 cites W2050425965 @default.
- W2002314183 cites W2057519049 @default.
- W2002314183 cites W2063443451 @default.
- W2002314183 cites W2081018457 @default.
- W2002314183 cites W2088015839 @default.
- W2002314183 cites W2135185120 @default.
- W2002314183 cites W2169199214 @default.
- W2002314183 cites W64567056 @default.
- W2002314183 doi "https://doi.org/10.1016/j.mseb.2009.04.002" @default.
- W2002314183 hasPublicationYear "2009" @default.
- W2002314183 type Work @default.
- W2002314183 sameAs 2002314183 @default.
- W2002314183 citedByCount "1" @default.
- W2002314183 crossrefType "journal-article" @default.
- W2002314183 hasAuthorship W2002314183A5049015358 @default.
- W2002314183 hasAuthorship W2002314183A5065766706 @default.
- W2002314183 hasConcept C106782819 @default.
- W2002314183 hasConcept C111368507 @default.
- W2002314183 hasConcept C113196181 @default.
- W2002314183 hasConcept C119599485 @default.
- W2002314183 hasConcept C120665830 @default.
- W2002314183 hasConcept C121332964 @default.
- W2002314183 hasConcept C127313418 @default.
- W2002314183 hasConcept C127413603 @default.
- W2002314183 hasConcept C132612359 @default.
- W2002314183 hasConcept C134112204 @default.
- W2002314183 hasConcept C147789679 @default.
- W2002314183 hasConcept C171250308 @default.
- W2002314183 hasConcept C185592680 @default.
- W2002314183 hasConcept C19067145 @default.
- W2002314183 hasConcept C192562407 @default.
- W2002314183 hasConcept C207114421 @default.
- W2002314183 hasConcept C22423302 @default.
- W2002314183 hasConcept C2777289219 @default.
- W2002314183 hasConcept C30646810 @default.
- W2002314183 hasConcept C43617362 @default.
- W2002314183 hasConcept C49040817 @default.
- W2002314183 hasConcept C49110097 @default.
- W2002314183 hasConcept C57863236 @default.
- W2002314183 hasConcept C62520636 @default.
- W2002314183 hasConcept C69990965 @default.
- W2002314183 hasConcept C82706917 @default.
- W2002314183 hasConcept C97355855 @default.
- W2002314183 hasConceptScore W2002314183C106782819 @default.
- W2002314183 hasConceptScore W2002314183C111368507 @default.
- W2002314183 hasConceptScore W2002314183C113196181 @default.
- W2002314183 hasConceptScore W2002314183C119599485 @default.
- W2002314183 hasConceptScore W2002314183C120665830 @default.
- W2002314183 hasConceptScore W2002314183C121332964 @default.
- W2002314183 hasConceptScore W2002314183C127313418 @default.
- W2002314183 hasConceptScore W2002314183C127413603 @default.
- W2002314183 hasConceptScore W2002314183C132612359 @default.
- W2002314183 hasConceptScore W2002314183C134112204 @default.
- W2002314183 hasConceptScore W2002314183C147789679 @default.
- W2002314183 hasConceptScore W2002314183C171250308 @default.
- W2002314183 hasConceptScore W2002314183C185592680 @default.
- W2002314183 hasConceptScore W2002314183C19067145 @default.
- W2002314183 hasConceptScore W2002314183C192562407 @default.
- W2002314183 hasConceptScore W2002314183C207114421 @default.
- W2002314183 hasConceptScore W2002314183C22423302 @default.
- W2002314183 hasConceptScore W2002314183C2777289219 @default.
- W2002314183 hasConceptScore W2002314183C30646810 @default.
- W2002314183 hasConceptScore W2002314183C43617362 @default.
- W2002314183 hasConceptScore W2002314183C49040817 @default.
- W2002314183 hasConceptScore W2002314183C49110097 @default.
- W2002314183 hasConceptScore W2002314183C57863236 @default.
- W2002314183 hasConceptScore W2002314183C62520636 @default.
- W2002314183 hasConceptScore W2002314183C69990965 @default.
- W2002314183 hasConceptScore W2002314183C82706917 @default.
- W2002314183 hasConceptScore W2002314183C97355855 @default.
- W2002314183 hasLocation W20023141831 @default.
- W2002314183 hasOpenAccess W2002314183 @default.
- W2002314183 hasPrimaryLocation W20023141831 @default.
- W2002314183 hasRelatedWork W1975437398 @default.
- W2002314183 hasRelatedWork W1977283319 @default.
- W2002314183 hasRelatedWork W1996303289 @default.
- W2002314183 hasRelatedWork W2017193327 @default.
- W2002314183 hasRelatedWork W2023167353 @default.
- W2002314183 hasRelatedWork W2036700144 @default.
- W2002314183 hasRelatedWork W2038531237 @default.
- W2002314183 hasRelatedWork W2042522071 @default.
- W2002314183 hasRelatedWork W2042992158 @default.
- W2002314183 hasRelatedWork W2043756988 @default.
- W2002314183 hasRelatedWork W2047575461 @default.
- W2002314183 hasRelatedWork W2049578974 @default.
- W2002314183 hasRelatedWork W2050425965 @default.