FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2002384889> ?p ?o ?g. }

• W2002384889 endingPage "42" @default.
• W2002384889 startingPage "39" @default.
• W2002384889 abstract "Abstract AlN films have been epitaxially grown on nitrided Al(1 1 1) substrates with various nitrogen pressures by pulsed laser deposition with an in-plane alignment of AlN[11–20]//Al[1–10]. The effect of nitrogen pressure on the surface morphologies and structural properties of AlN films is studied in detail. It reveals that AlN films grown at appropriate pressure exhibit very flat and smooth surface with a surface root-mean-square roughness of 1.1 nm, and abrupt interface; while AlN films grown at other pressures show poorer properties. This work presents an optimized growth conditions for the growth of high-quality AlN films for the application of film bulk acoustic wave resonators and surface acoustic wave devices that ask for the flat surface and abrupt interface." @default.
• W2002384889 created "2016-06-24" @default.
• W2002384889 creator A5009717743 @default.
• W2002384889 creator A5015534012 @default.
• W2002384889 creator A5022050025 @default.
• W2002384889 creator A5022583120 @default.
• W2002384889 creator A5022728200 @default.
• W2002384889 creator A5031343313 @default.
• W2002384889 creator A5037641689 @default.
• W2002384889 creator A5074007881 @default.
• W2002384889 creator A5082734009 @default.
• W2002384889 date "2014-08-01" @default.
• W2002384889 modified "2023-10-16" @default.
• W2002384889 title "Effect of nitrogen pressure on the properties of AlN films grown on nitrided Al(111) substrates by pulsed laser deposition" @default.
• W2002384889 cites W1967497658 @default.
• W2002384889 cites W1999195111 @default.
• W2002384889 cites W2000309132 @default.
• W2002384889 cites W2011628146 @default.
• W2002384889 cites W2034986831 @default.
• W2002384889 cites W2043346448 @default.
• W2002384889 cites W2065548880 @default.
• W2002384889 cites W2079692833 @default.
• W2002384889 cites W2093064365 @default.
• W2002384889 cites W590555141 @default.
• W2002384889 doi "https://doi.org/10.1016/j.matlet.2014.05.031" @default.
• W2002384889 hasPublicationYear "2014" @default.
• W2002384889 type Work @default.
• W2002384889 sameAs 2002384889 @default.
• W2002384889 citedByCount "15" @default.
• W2002384889 countsByYear W20023848892014 @default.
• W2002384889 countsByYear W20023848892015 @default.
• W2002384889 countsByYear W20023848892016 @default.
• W2002384889 countsByYear W20023848892017 @default.
• W2002384889 countsByYear W20023848892018 @default.
• W2002384889 countsByYear W20023848892020 @default.
• W2002384889 countsByYear W20023848892022 @default.
• W2002384889 crossrefType "journal-article" @default.
• W2002384889 hasAuthorship W2002384889A5009717743 @default.
• W2002384889 hasAuthorship W2002384889A5015534012 @default.
• W2002384889 hasAuthorship W2002384889A5022050025 @default.
• W2002384889 hasAuthorship W2002384889A5022583120 @default.
• W2002384889 hasAuthorship W2002384889A5022728200 @default.
• W2002384889 hasAuthorship W2002384889A5031343313 @default.
• W2002384889 hasAuthorship W2002384889A5037641689 @default.
• W2002384889 hasAuthorship W2002384889A5074007881 @default.
• W2002384889 hasAuthorship W2002384889A5082734009 @default.
• W2002384889 hasConcept C107872376 @default.
• W2002384889 hasConcept C113196181 @default.
• W2002384889 hasConcept C121332964 @default.
• W2002384889 hasConcept C127413603 @default.
• W2002384889 hasConcept C13862629 @default.
• W2002384889 hasConcept C151730666 @default.
• W2002384889 hasConcept C171250308 @default.
• W2002384889 hasConcept C185592680 @default.
• W2002384889 hasConcept C19067145 @default.
• W2002384889 hasConcept C191897082 @default.
• W2002384889 hasConcept C192562407 @default.
• W2002384889 hasConcept C194760766 @default.
• W2002384889 hasConcept C2779227376 @default.
• W2002384889 hasConcept C2816523 @default.
• W2002384889 hasConcept C37982897 @default.
• W2002384889 hasConcept C42360764 @default.
• W2002384889 hasConcept C537208039 @default.
• W2002384889 hasConcept C62520636 @default.
• W2002384889 hasConcept C64297162 @default.
• W2002384889 hasConcept C86803240 @default.
• W2002384889 hasConceptScore W2002384889C107872376 @default.
• W2002384889 hasConceptScore W2002384889C113196181 @default.
• W2002384889 hasConceptScore W2002384889C121332964 @default.
• W2002384889 hasConceptScore W2002384889C127413603 @default.
• W2002384889 hasConceptScore W2002384889C13862629 @default.
• W2002384889 hasConceptScore W2002384889C151730666 @default.
• W2002384889 hasConceptScore W2002384889C171250308 @default.
• W2002384889 hasConceptScore W2002384889C185592680 @default.
• W2002384889 hasConceptScore W2002384889C19067145 @default.
• W2002384889 hasConceptScore W2002384889C191897082 @default.
• W2002384889 hasConceptScore W2002384889C192562407 @default.
• W2002384889 hasConceptScore W2002384889C194760766 @default.
• W2002384889 hasConceptScore W2002384889C2779227376 @default.
• W2002384889 hasConceptScore W2002384889C2816523 @default.
• W2002384889 hasConceptScore W2002384889C37982897 @default.
• W2002384889 hasConceptScore W2002384889C42360764 @default.
• W2002384889 hasConceptScore W2002384889C537208039 @default.
• W2002384889 hasConceptScore W2002384889C62520636 @default.
• W2002384889 hasConceptScore W2002384889C64297162 @default.
• W2002384889 hasConceptScore W2002384889C86803240 @default.
• W2002384889 hasLocation W20023848891 @default.
• W2002384889 hasOpenAccess W2002384889 @default.
• W2002384889 hasPrimaryLocation W20023848891 @default.
• W2002384889 hasRelatedWork W1779249657 @default.
• W2002384889 hasRelatedWork W1964802375 @default.
• W2002384889 hasRelatedWork W1988591635 @default.
• W2002384889 hasRelatedWork W2012783318 @default.
• W2002384889 hasRelatedWork W2089028087 @default.
• W2002384889 hasRelatedWork W2392441461 @default.
• W2002384889 hasRelatedWork W2623124000 @default.
• W2002384889 hasRelatedWork W2937808965 @default.
• W2002384889 hasRelatedWork W2991955523 @default.

• next