Matches in SemOpenAlex for { <https://semopenalex.org/work/W2002493088> ?p ?o ?g. }
Showing items 1 to 83 of
83
with 100 items per page.
- W2002493088 abstract "Nickel oxide (NiO) film was formed on the SiO<sub>2</sub>/Si substrate at the room temperature with water cooling system by reactive RF sputter. The feasibility of bolometric material was investigated, and a microbolometer using the NiO film was fabricated and evaluated. The NiO films were analyzed by using grazing-incidence X-ray diffraction (GIXRD). The NiO(111), NiO (200), and NiO (220) peaks expected as the main spectrum were dominantly appeared on the polycrystalline NiO films. The representative resistivity acquired at the O<sub>2</sub>/(Ar+O<sub>2</sub>) ratio of 10% sample was about 40.6 Ωcm. The resistivity of 40.6 Ωcm obtained in low oxygen partial pressure was inclined to reduce to 18.65 Ωcm according to the increase of the O<sub>2</sub>/(Ar+O<sub>2</sub>) ratio. The TCR value of fabricated microbolometer was −1.67%/℃ at the NiO film resistivity of 40.6 Ωcm. The characteristics of fabricated NiO film and microbolometer were demonstrated by XRD patterns, TCR value, and SEM image." @default.
- W2002493088 created "2016-06-24" @default.
- W2002493088 creator A5006999745 @default.
- W2002493088 creator A5050416890 @default.
- W2002493088 creator A5081375923 @default.
- W2002493088 creator A5086997980 @default.
- W2002493088 creator A5091719918 @default.
- W2002493088 date "2013-06-11" @default.
- W2002493088 modified "2023-10-16" @default.
- W2002493088 title "Characteristic of nickel oxide microbolometer" @default.
- W2002493088 doi "https://doi.org/10.1117/12.2015676" @default.
- W2002493088 hasPublicationYear "2013" @default.
- W2002493088 type Work @default.
- W2002493088 sameAs 2002493088 @default.
- W2002493088 citedByCount "1" @default.
- W2002493088 countsByYear W20024930882023 @default.
- W2002493088 crossrefType "proceedings-article" @default.
- W2002493088 hasAuthorship W2002493088A5006999745 @default.
- W2002493088 hasAuthorship W2002493088A5050416890 @default.
- W2002493088 hasAuthorship W2002493088A5081375923 @default.
- W2002493088 hasAuthorship W2002493088A5086997980 @default.
- W2002493088 hasAuthorship W2002493088A5091719918 @default.
- W2002493088 hasConcept C113196181 @default.
- W2002493088 hasConcept C120665830 @default.
- W2002493088 hasConcept C121332964 @default.
- W2002493088 hasConcept C137637335 @default.
- W2002493088 hasConcept C161790260 @default.
- W2002493088 hasConcept C171250308 @default.
- W2002493088 hasConcept C185592680 @default.
- W2002493088 hasConcept C19067145 @default.
- W2002493088 hasConcept C191897082 @default.
- W2002493088 hasConcept C192562407 @default.
- W2002493088 hasConcept C21028948 @default.
- W2002493088 hasConcept C22423302 @default.
- W2002493088 hasConcept C2776111576 @default.
- W2002493088 hasConcept C2776652806 @default.
- W2002493088 hasConcept C43617362 @default.
- W2002493088 hasConcept C49040817 @default.
- W2002493088 hasConcept C504270822 @default.
- W2002493088 hasConcept C55493867 @default.
- W2002493088 hasConcept C62520636 @default.
- W2002493088 hasConcept C69990965 @default.
- W2002493088 hasConcept C74575197 @default.
- W2002493088 hasConcept C94915269 @default.
- W2002493088 hasConceptScore W2002493088C113196181 @default.
- W2002493088 hasConceptScore W2002493088C120665830 @default.
- W2002493088 hasConceptScore W2002493088C121332964 @default.
- W2002493088 hasConceptScore W2002493088C137637335 @default.
- W2002493088 hasConceptScore W2002493088C161790260 @default.
- W2002493088 hasConceptScore W2002493088C171250308 @default.
- W2002493088 hasConceptScore W2002493088C185592680 @default.
- W2002493088 hasConceptScore W2002493088C19067145 @default.
- W2002493088 hasConceptScore W2002493088C191897082 @default.
- W2002493088 hasConceptScore W2002493088C192562407 @default.
- W2002493088 hasConceptScore W2002493088C21028948 @default.
- W2002493088 hasConceptScore W2002493088C22423302 @default.
- W2002493088 hasConceptScore W2002493088C2776111576 @default.
- W2002493088 hasConceptScore W2002493088C2776652806 @default.
- W2002493088 hasConceptScore W2002493088C43617362 @default.
- W2002493088 hasConceptScore W2002493088C49040817 @default.
- W2002493088 hasConceptScore W2002493088C504270822 @default.
- W2002493088 hasConceptScore W2002493088C55493867 @default.
- W2002493088 hasConceptScore W2002493088C62520636 @default.
- W2002493088 hasConceptScore W2002493088C69990965 @default.
- W2002493088 hasConceptScore W2002493088C74575197 @default.
- W2002493088 hasConceptScore W2002493088C94915269 @default.
- W2002493088 hasLocation W20024930881 @default.
- W2002493088 hasOpenAccess W2002493088 @default.
- W2002493088 hasPrimaryLocation W20024930881 @default.
- W2002493088 hasRelatedWork W1969311157 @default.
- W2002493088 hasRelatedWork W1970105034 @default.
- W2002493088 hasRelatedWork W1991490619 @default.
- W2002493088 hasRelatedWork W2002493088 @default.
- W2002493088 hasRelatedWork W2035932255 @default.
- W2002493088 hasRelatedWork W2060059003 @default.
- W2002493088 hasRelatedWork W2093085334 @default.
- W2002493088 hasRelatedWork W2608940903 @default.
- W2002493088 hasRelatedWork W2778060524 @default.
- W2002493088 hasRelatedWork W3200844633 @default.
- W2002493088 isParatext "false" @default.
- W2002493088 isRetracted "false" @default.
- W2002493088 magId "2002493088" @default.
- W2002493088 workType "article" @default.