Matches in SemOpenAlex for { <https://semopenalex.org/work/W2002510175> ?p ?o ?g. }
Showing items 1 to 80 of
80
with 100 items per page.
- W2002510175 abstract "This paper presents the processes of fabrication method in the selective area of growth Carbon Nanotubes (CNTs) on the substrate with an Interdigitated (IDE) electrodes pattern using resist AZ1500. The substrate used in this work was Gallium Phosphate with Chromium (0.021μm) and Platinum (0.11μm) as the metal layer. The CNTS was grown in two different temperatures using chemical vapor deposition (CVD) with hydrogen as the process gas and benzene as the hydrocarbon. The most suitable temperature growth for CNTs in this work was found to be 800ºC. In this study, CNTs were produced by CVD impregnated with iron nitrate (Fe(NO <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</inf> ) <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</inf> • <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>9</inf> H <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</inf> O) solution and Resist AZ1500 as the mask for the selective area grown. Maximum temperature for Resist AZ1500 was at 120ºC. Therefore Iron Nitrate was used as the protector to protect the resist to be evaporated. The Resist AZ1500 and the Iron Nitrate were coated in different layer on the substrate using standard lithography method." @default.
- W2002510175 created "2016-06-24" @default.
- W2002510175 creator A5039084059 @default.
- W2002510175 creator A5048090706 @default.
- W2002510175 creator A5087109816 @default.
- W2002510175 date "2013-09-01" @default.
- W2002510175 modified "2023-10-14" @default.
- W2002510175 title "Lithography method for selective area of CNTs growth" @default.
- W2002510175 cites W1972285888 @default.
- W2002510175 cites W1994884419 @default.
- W2002510175 cites W2008302913 @default.
- W2002510175 cites W2022354447 @default.
- W2002510175 cites W2040717113 @default.
- W2002510175 cites W2092185779 @default.
- W2002510175 cites W2100292551 @default.
- W2002510175 doi "https://doi.org/10.1109/rsm.2013.6706552" @default.
- W2002510175 hasPublicationYear "2013" @default.
- W2002510175 type Work @default.
- W2002510175 sameAs 2002510175 @default.
- W2002510175 citedByCount "1" @default.
- W2002510175 countsByYear W20025101752016 @default.
- W2002510175 crossrefType "proceedings-article" @default.
- W2002510175 hasAuthorship W2002510175A5039084059 @default.
- W2002510175 hasAuthorship W2002510175A5048090706 @default.
- W2002510175 hasAuthorship W2002510175A5087109816 @default.
- W2002510175 hasBestOaLocation W20025101752 @default.
- W2002510175 hasConcept C111368507 @default.
- W2002510175 hasConcept C113196181 @default.
- W2002510175 hasConcept C127313418 @default.
- W2002510175 hasConcept C127413603 @default.
- W2002510175 hasConcept C161790260 @default.
- W2002510175 hasConcept C171250308 @default.
- W2002510175 hasConcept C178790620 @default.
- W2002510175 hasConcept C185592680 @default.
- W2002510175 hasConcept C192562407 @default.
- W2002510175 hasConcept C204223013 @default.
- W2002510175 hasConcept C2777289219 @default.
- W2002510175 hasConcept C2777691172 @default.
- W2002510175 hasConcept C2779227376 @default.
- W2002510175 hasConcept C42360764 @default.
- W2002510175 hasConcept C49040817 @default.
- W2002510175 hasConcept C518104683 @default.
- W2002510175 hasConcept C53524968 @default.
- W2002510175 hasConcept C57410435 @default.
- W2002510175 hasConceptScore W2002510175C111368507 @default.
- W2002510175 hasConceptScore W2002510175C113196181 @default.
- W2002510175 hasConceptScore W2002510175C127313418 @default.
- W2002510175 hasConceptScore W2002510175C127413603 @default.
- W2002510175 hasConceptScore W2002510175C161790260 @default.
- W2002510175 hasConceptScore W2002510175C171250308 @default.
- W2002510175 hasConceptScore W2002510175C178790620 @default.
- W2002510175 hasConceptScore W2002510175C185592680 @default.
- W2002510175 hasConceptScore W2002510175C192562407 @default.
- W2002510175 hasConceptScore W2002510175C204223013 @default.
- W2002510175 hasConceptScore W2002510175C2777289219 @default.
- W2002510175 hasConceptScore W2002510175C2777691172 @default.
- W2002510175 hasConceptScore W2002510175C2779227376 @default.
- W2002510175 hasConceptScore W2002510175C42360764 @default.
- W2002510175 hasConceptScore W2002510175C49040817 @default.
- W2002510175 hasConceptScore W2002510175C518104683 @default.
- W2002510175 hasConceptScore W2002510175C53524968 @default.
- W2002510175 hasConceptScore W2002510175C57410435 @default.
- W2002510175 hasLocation W20025101751 @default.
- W2002510175 hasLocation W20025101752 @default.
- W2002510175 hasOpenAccess W2002510175 @default.
- W2002510175 hasPrimaryLocation W20025101751 @default.
- W2002510175 hasRelatedWork W178758932 @default.
- W2002510175 hasRelatedWork W1994078670 @default.
- W2002510175 hasRelatedWork W2005993612 @default.
- W2002510175 hasRelatedWork W2042222646 @default.
- W2002510175 hasRelatedWork W2063218666 @default.
- W2002510175 hasRelatedWork W2070952328 @default.
- W2002510175 hasRelatedWork W2084601989 @default.
- W2002510175 hasRelatedWork W2089746739 @default.
- W2002510175 hasRelatedWork W2332072138 @default.
- W2002510175 hasRelatedWork W2890402440 @default.
- W2002510175 isParatext "false" @default.
- W2002510175 isRetracted "false" @default.
- W2002510175 magId "2002510175" @default.
- W2002510175 workType "article" @default.