Matches in SemOpenAlex for { <https://semopenalex.org/work/W2002556272> ?p ?o ?g. }
Showing items 1 to 89 of
89
with 100 items per page.
- W2002556272 endingPage "629" @default.
- W2002556272 startingPage "627" @default.
- W2002556272 abstract "Using a full calculation including all the couplings between the dopants and the point defects, we show that the transient effect observed at short times for the influence of oxidation on dopant diffusion in Si cannot be explained by the existence of an energy barrier to the recombination of interstitials and vacancies. We suggest that this transient is due to a transient in the self-interstitial injection, due to high strains at the early stage of the oxidation, which can relax later through the viscoelastic flow of the oxide." @default.
- W2002556272 created "2016-06-24" @default.
- W2002556272 creator A5032500954 @default.
- W2002556272 creator A5039267020 @default.
- W2002556272 date "1986-03-10" @default.
- W2002556272 modified "2023-10-04" @default.
- W2002556272 title "Point defect kinetics and dopant diffusion during silicon oxidation" @default.
- W2002556272 cites W1985045299 @default.
- W2002556272 cites W1986743793 @default.
- W2002556272 cites W1996770610 @default.
- W2002556272 cites W2042962925 @default.
- W2002556272 cites W2051024068 @default.
- W2002556272 cites W2074272656 @default.
- W2002556272 cites W2078140681 @default.
- W2002556272 cites W2080862533 @default.
- W2002556272 cites W2086031691 @default.
- W2002556272 doi "https://doi.org/10.1063/1.96725" @default.
- W2002556272 hasPublicationYear "1986" @default.
- W2002556272 type Work @default.
- W2002556272 sameAs 2002556272 @default.
- W2002556272 citedByCount "8" @default.
- W2002556272 crossrefType "journal-article" @default.
- W2002556272 hasAuthorship W2002556272A5032500954 @default.
- W2002556272 hasAuthorship W2002556272A5039267020 @default.
- W2002556272 hasConcept C111919701 @default.
- W2002556272 hasConcept C121332964 @default.
- W2002556272 hasConcept C147789679 @default.
- W2002556272 hasConcept C148898269 @default.
- W2002556272 hasConcept C159467904 @default.
- W2002556272 hasConcept C164675345 @default.
- W2002556272 hasConcept C185592680 @default.
- W2002556272 hasConcept C191897082 @default.
- W2002556272 hasConcept C191952053 @default.
- W2002556272 hasConcept C192562407 @default.
- W2002556272 hasConcept C2779851234 @default.
- W2002556272 hasConcept C2780799671 @default.
- W2002556272 hasConcept C41008148 @default.
- W2002556272 hasConcept C41999313 @default.
- W2002556272 hasConcept C49040817 @default.
- W2002556272 hasConcept C544956773 @default.
- W2002556272 hasConcept C57863236 @default.
- W2002556272 hasConcept C62520636 @default.
- W2002556272 hasConcept C69357855 @default.
- W2002556272 hasConcept C8010536 @default.
- W2002556272 hasConcept C95121573 @default.
- W2002556272 hasConcept C97355855 @default.
- W2002556272 hasConceptScore W2002556272C111919701 @default.
- W2002556272 hasConceptScore W2002556272C121332964 @default.
- W2002556272 hasConceptScore W2002556272C147789679 @default.
- W2002556272 hasConceptScore W2002556272C148898269 @default.
- W2002556272 hasConceptScore W2002556272C159467904 @default.
- W2002556272 hasConceptScore W2002556272C164675345 @default.
- W2002556272 hasConceptScore W2002556272C185592680 @default.
- W2002556272 hasConceptScore W2002556272C191897082 @default.
- W2002556272 hasConceptScore W2002556272C191952053 @default.
- W2002556272 hasConceptScore W2002556272C192562407 @default.
- W2002556272 hasConceptScore W2002556272C2779851234 @default.
- W2002556272 hasConceptScore W2002556272C2780799671 @default.
- W2002556272 hasConceptScore W2002556272C41008148 @default.
- W2002556272 hasConceptScore W2002556272C41999313 @default.
- W2002556272 hasConceptScore W2002556272C49040817 @default.
- W2002556272 hasConceptScore W2002556272C544956773 @default.
- W2002556272 hasConceptScore W2002556272C57863236 @default.
- W2002556272 hasConceptScore W2002556272C62520636 @default.
- W2002556272 hasConceptScore W2002556272C69357855 @default.
- W2002556272 hasConceptScore W2002556272C8010536 @default.
- W2002556272 hasConceptScore W2002556272C95121573 @default.
- W2002556272 hasConceptScore W2002556272C97355855 @default.
- W2002556272 hasIssue "10" @default.
- W2002556272 hasLocation W20025562721 @default.
- W2002556272 hasOpenAccess W2002556272 @default.
- W2002556272 hasPrimaryLocation W20025562721 @default.
- W2002556272 hasRelatedWork W2023279546 @default.
- W2002556272 hasRelatedWork W2035709483 @default.
- W2002556272 hasRelatedWork W2049212995 @default.
- W2002556272 hasRelatedWork W2049650749 @default.
- W2002556272 hasRelatedWork W2070923670 @default.
- W2002556272 hasRelatedWork W2082174877 @default.
- W2002556272 hasRelatedWork W2090017557 @default.
- W2002556272 hasRelatedWork W2184235900 @default.
- W2002556272 hasRelatedWork W4214938698 @default.
- W2002556272 hasRelatedWork W965265815 @default.
- W2002556272 hasVolume "48" @default.
- W2002556272 isParatext "false" @default.
- W2002556272 isRetracted "false" @default.
- W2002556272 magId "2002556272" @default.
- W2002556272 workType "article" @default.