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- W2002607427 endingPage "216" @default.
- W2002607427 startingPage "213" @default.
- W2002607427 abstract "Silicon films grown on sapphire at fast (3 μ m min -1 ) and slow (0.3 μ m min -1 ) rates were investigated by extended range MIS capacitance-voltage, transmission electron microscopy, Rutherford backscattering spectrometry and secondary ion mass spectrometry measurements. Results show that the epitaxial silicon film grown at the fast rate has positive interfacial charges and good crystallinity with twins and stacking faults localized mostly in the region near the SiAl 2 O 3 interface. In contrast, the film grown at the slow rate has (1) negative interfacial charges, (2) an appreciable amount of out-doped aluminum and (3) poor crystallinity with twins extending to the top surface." @default.
- W2002607427 created "2016-06-24" @default.
- W2002607427 creator A5004106703 @default.
- W2002607427 creator A5015648949 @default.
- W2002607427 creator A5065770658 @default.
- W2002607427 creator A5070459868 @default.
- W2002607427 date "1981-08-01" @default.
- W2002607427 modified "2023-09-27" @default.
- W2002607427 title "Silicon-on-sapphire films with negative and positive interfacial charges" @default.
- W2002607427 cites W1974792827 @default.
- W2002607427 cites W2047292437 @default.
- W2002607427 cites W2055025966 @default.
- W2002607427 cites W2073484003 @default.
- W2002607427 cites W2095887754 @default.
- W2002607427 doi "https://doi.org/10.1016/0040-6090(81)90186-3" @default.
- W2002607427 hasPublicationYear "1981" @default.
- W2002607427 type Work @default.
- W2002607427 sameAs 2002607427 @default.
- W2002607427 citedByCount "4" @default.
- W2002607427 crossrefType "journal-article" @default.
- W2002607427 hasAuthorship W2002607427A5004106703 @default.
- W2002607427 hasAuthorship W2002607427A5015648949 @default.
- W2002607427 hasAuthorship W2002607427A5065770658 @default.
- W2002607427 hasAuthorship W2002607427A5070459868 @default.
- W2002607427 hasConcept C110738630 @default.
- W2002607427 hasConcept C113196181 @default.
- W2002607427 hasConcept C120665830 @default.
- W2002607427 hasConcept C121332964 @default.
- W2002607427 hasConcept C145148216 @default.
- W2002607427 hasConcept C146088050 @default.
- W2002607427 hasConcept C159985019 @default.
- W2002607427 hasConcept C171250308 @default.
- W2002607427 hasConcept C178790620 @default.
- W2002607427 hasConcept C185592680 @default.
- W2002607427 hasConcept C19067145 @default.
- W2002607427 hasConcept C192562407 @default.
- W2002607427 hasConcept C2779227376 @default.
- W2002607427 hasConcept C2780064504 @default.
- W2002607427 hasConcept C2780547777 @default.
- W2002607427 hasConcept C43617362 @default.
- W2002607427 hasConcept C46275449 @default.
- W2002607427 hasConcept C49040817 @default.
- W2002607427 hasConcept C520434653 @default.
- W2002607427 hasConcept C544956773 @default.
- W2002607427 hasConcept C57863236 @default.
- W2002607427 hasConcept C77671233 @default.
- W2002607427 hasConceptScore W2002607427C110738630 @default.
- W2002607427 hasConceptScore W2002607427C113196181 @default.
- W2002607427 hasConceptScore W2002607427C120665830 @default.
- W2002607427 hasConceptScore W2002607427C121332964 @default.
- W2002607427 hasConceptScore W2002607427C145148216 @default.
- W2002607427 hasConceptScore W2002607427C146088050 @default.
- W2002607427 hasConceptScore W2002607427C159985019 @default.
- W2002607427 hasConceptScore W2002607427C171250308 @default.
- W2002607427 hasConceptScore W2002607427C178790620 @default.
- W2002607427 hasConceptScore W2002607427C185592680 @default.
- W2002607427 hasConceptScore W2002607427C19067145 @default.
- W2002607427 hasConceptScore W2002607427C192562407 @default.
- W2002607427 hasConceptScore W2002607427C2779227376 @default.
- W2002607427 hasConceptScore W2002607427C2780064504 @default.
- W2002607427 hasConceptScore W2002607427C2780547777 @default.
- W2002607427 hasConceptScore W2002607427C43617362 @default.
- W2002607427 hasConceptScore W2002607427C46275449 @default.
- W2002607427 hasConceptScore W2002607427C49040817 @default.
- W2002607427 hasConceptScore W2002607427C520434653 @default.
- W2002607427 hasConceptScore W2002607427C544956773 @default.
- W2002607427 hasConceptScore W2002607427C57863236 @default.
- W2002607427 hasConceptScore W2002607427C77671233 @default.
- W2002607427 hasIssue "3" @default.
- W2002607427 hasLocation W20026074271 @default.
- W2002607427 hasOpenAccess W2002607427 @default.
- W2002607427 hasPrimaryLocation W20026074271 @default.
- W2002607427 hasRelatedWork W1979162764 @default.
- W2002607427 hasRelatedWork W2005194554 @default.
- W2002607427 hasRelatedWork W2014092607 @default.
- W2002607427 hasRelatedWork W2029242240 @default.
- W2002607427 hasRelatedWork W2036544379 @default.
- W2002607427 hasRelatedWork W2093856344 @default.
- W2002607427 hasRelatedWork W2094664728 @default.
- W2002607427 hasRelatedWork W2130408374 @default.
- W2002607427 hasRelatedWork W2720647270 @default.
- W2002607427 hasRelatedWork W4221072583 @default.
- W2002607427 hasVolume "82" @default.
- W2002607427 isParatext "false" @default.
- W2002607427 isRetracted "false" @default.
- W2002607427 magId "2002607427" @default.
- W2002607427 workType "article" @default.