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- W2002681870 endingPage "205" @default.
- W2002681870 startingPage "195" @default.
- W2002681870 abstract "Aluminum metallization is most widely used for contacts and interconnections in both bipolar and MOS integrated circuits. Aluminum alloy films, such as AlSi and AlCu films, were introduced to minimize the erosion of silicon from contact windows and to improve the electromigration resistance of interconnections. Recently, magnetron sputter-deposited aluminum, Al2wt.%Cu and Al2wt.% Cu 1wt.%Si films were employed to study the stability and contact resistance of Si-(Al alloy film) contacts on devices with shallow junction depths of the order of 0.35μm. Test structures were used to determine the leakage currents of 100 n+/p+ diodes as a function of the storage time (up to 1000 h) at 150°C, and the physical nature of the Si(Al alloy) contacts was examined using scanning electron microscopy. The compatibility of the AlCuSi metallization with the very large scale integrated requirements of interconnection and Si-metal contacts for shallow junction devices is discussed." @default.
- W2002681870 created "2016-06-24" @default.
- W2002681870 creator A5055249404 @default.
- W2002681870 date "1981-09-01" @default.
- W2002681870 modified "2023-09-26" @default.
- W2002681870 title "Aluminum alloy metallization for integrated circuits" @default.
- W2002681870 cites W1968134916 @default.
- W2002681870 cites W1990300238 @default.
- W2002681870 cites W2003118210 @default.
- W2002681870 cites W2015101381 @default.
- W2002681870 cites W2027230596 @default.
- W2002681870 cites W2033169229 @default.
- W2002681870 cites W2103757453 @default.
- W2002681870 cites W2131462820 @default.
- W2002681870 cites W2983511862 @default.
- W2002681870 doi "https://doi.org/10.1016/0040-6090(81)90666-0" @default.
- W2002681870 hasPublicationYear "1981" @default.
- W2002681870 type Work @default.
- W2002681870 sameAs 2002681870 @default.
- W2002681870 citedByCount "21" @default.
- W2002681870 countsByYear W20026818702023 @default.
- W2002681870 crossrefType "journal-article" @default.
- W2002681870 hasAuthorship W2002681870A5055249404 @default.
- W2002681870 hasConcept C123671423 @default.
- W2002681870 hasConcept C123745756 @default.
- W2002681870 hasConcept C132235601 @default.
- W2002681870 hasConcept C138055206 @default.
- W2002681870 hasConcept C159985019 @default.
- W2002681870 hasConcept C171250308 @default.
- W2002681870 hasConcept C19067145 @default.
- W2002681870 hasConcept C191897082 @default.
- W2002681870 hasConcept C192562407 @default.
- W2002681870 hasConcept C22423302 @default.
- W2002681870 hasConcept C26771246 @default.
- W2002681870 hasConcept C2779227376 @default.
- W2002681870 hasConcept C2780026712 @default.
- W2002681870 hasConcept C31258907 @default.
- W2002681870 hasConcept C41008148 @default.
- W2002681870 hasConcept C49040817 @default.
- W2002681870 hasConcept C513153333 @default.
- W2002681870 hasConcept C530198007 @default.
- W2002681870 hasConcept C544956773 @default.
- W2002681870 hasConcept C61427134 @default.
- W2002681870 hasConcept C78434282 @default.
- W2002681870 hasConceptScore W2002681870C123671423 @default.
- W2002681870 hasConceptScore W2002681870C123745756 @default.
- W2002681870 hasConceptScore W2002681870C132235601 @default.
- W2002681870 hasConceptScore W2002681870C138055206 @default.
- W2002681870 hasConceptScore W2002681870C159985019 @default.
- W2002681870 hasConceptScore W2002681870C171250308 @default.
- W2002681870 hasConceptScore W2002681870C19067145 @default.
- W2002681870 hasConceptScore W2002681870C191897082 @default.
- W2002681870 hasConceptScore W2002681870C192562407 @default.
- W2002681870 hasConceptScore W2002681870C22423302 @default.
- W2002681870 hasConceptScore W2002681870C26771246 @default.
- W2002681870 hasConceptScore W2002681870C2779227376 @default.
- W2002681870 hasConceptScore W2002681870C2780026712 @default.
- W2002681870 hasConceptScore W2002681870C31258907 @default.
- W2002681870 hasConceptScore W2002681870C41008148 @default.
- W2002681870 hasConceptScore W2002681870C49040817 @default.
- W2002681870 hasConceptScore W2002681870C513153333 @default.
- W2002681870 hasConceptScore W2002681870C530198007 @default.
- W2002681870 hasConceptScore W2002681870C544956773 @default.
- W2002681870 hasConceptScore W2002681870C61427134 @default.
- W2002681870 hasConceptScore W2002681870C78434282 @default.
- W2002681870 hasIssue "2" @default.
- W2002681870 hasLocation W20026818701 @default.
- W2002681870 hasOpenAccess W2002681870 @default.
- W2002681870 hasPrimaryLocation W20026818701 @default.
- W2002681870 hasRelatedWork W2066894991 @default.
- W2002681870 hasRelatedWork W2086741567 @default.
- W2002681870 hasRelatedWork W2164844409 @default.
- W2002681870 hasRelatedWork W2172686119 @default.
- W2002681870 hasRelatedWork W2280609312 @default.
- W2002681870 hasRelatedWork W2334873409 @default.
- W2002681870 hasRelatedWork W3171226114 @default.
- W2002681870 hasRelatedWork W4226468903 @default.
- W2002681870 hasRelatedWork W92925067 @default.
- W2002681870 hasRelatedWork W2467994785 @default.
- W2002681870 hasVolume "83" @default.
- W2002681870 isParatext "false" @default.
- W2002681870 isRetracted "false" @default.
- W2002681870 magId "2002681870" @default.
- W2002681870 workType "article" @default.