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- W2002682767 abstract "In the age of submicron optical lithography, focus has become a critical process parameter. Each decrease in minimum feature size is accompanied by a corresponding decrease in depth-of-focus (DOF). Sources of focus errors, such as wafer warpage, topography, and the thickness of the photoresist, however, are not being reduced in proportion to the DOF. Thus, the effects of focus on the practical resolution capabilities of a lithographic tool are becoming increasingly important." @default.
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- W2002682767 title "<title>Understanding Focus Effects In Submicron Optical Lithography</title>" @default.
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- W2002682767 doi "https://doi.org/10.1117/12.968408" @default.
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