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- W2002814701 abstract "The suitability of refractory metal, molybdenum, as a material for microstructures in MEMS is explored in this paper. This paper describes the effects of dc magnetron sputtering conditions on the residual stress of the film. The effects of post deposition annealing as a means of stress relief are also reported. Post deposition annealing also addresses the problems of film adhesion. An example of the application of Mo is given in the form of a cantilever structure suspended over a silicon gap which involves both surface and bulk micromachining." @default.
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- W2002814701 date "1997-11-14" @default.
- W2002814701 modified "2023-09-23" @default.
- W2002814701 title "DC magnetron-sputtered molybdenum thin films for micromechanical structures" @default.
- W2002814701 doi "https://doi.org/10.1117/12.293487" @default.
- W2002814701 hasPublicationYear "1997" @default.
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