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- W2002821243 endingPage "053002" @default.
- W2002821243 startingPage "053002" @default.
- W2002821243 abstract "The growth of reactively sputtered TiN films is discussed. First, an overview of the existing models in the literature that describe the development of the orientation and microstructure is given. Then, these models are critically confronted with the results of experiments published in the literature and performed by the authors. The latter experiments focus especially on the determination of the energy flux and atomic N/Ti flux towards the substrate and lead to the conclusion that these fluxes towards the substrate play a key role in the growth of the TiN films. This relation between these fluxes and the microstructure of the TiN films gives further evidence to the previously published extended structure zone model." @default.
- W2002821243 created "2016-06-24" @default.
- W2002821243 creator A5000501132 @default.
- W2002821243 creator A5044276333 @default.
- W2002821243 date "2009-02-18" @default.
- W2002821243 modified "2023-10-14" @default.
- W2002821243 title "Reactive sputter deposition of TiN layers: modelling the growth by characterization of particle fluxes towards the substrate" @default.
- W2002821243 cites W1626739009 @default.
- W2002821243 cites W1964694528 @default.
- W2002821243 cites W1968873436 @default.
- W2002821243 cites W1969695797 @default.
- W2002821243 cites W1969772545 @default.
- W2002821243 cites W1971515011 @default.
- W2002821243 cites W1972326420 @default.
- W2002821243 cites W1973523756 @default.
- W2002821243 cites W1973913422 @default.
- W2002821243 cites W1975129698 @default.
- W2002821243 cites W1979526951 @default.
- W2002821243 cites W1980504091 @default.
- W2002821243 cites W1984012869 @default.
- W2002821243 cites W1984753485 @default.
- W2002821243 cites W1985317651 @default.
- W2002821243 cites W1985424666 @default.
- W2002821243 cites W1987394515 @default.
- W2002821243 cites W1987607215 @default.
- W2002821243 cites W1989832590 @default.
- W2002821243 cites W1990589770 @default.
- W2002821243 cites W1990716263 @default.
- W2002821243 cites W1994812280 @default.
- W2002821243 cites W1996414637 @default.
- W2002821243 cites W1996552980 @default.
- W2002821243 cites W1999424953 @default.
- W2002821243 cites W2002737942 @default.
- W2002821243 cites W2002900002 @default.
- W2002821243 cites W2008399916 @default.
- W2002821243 cites W2009642697 @default.
- W2002821243 cites W2009661921 @default.
- W2002821243 cites W2009674323 @default.
- W2002821243 cites W2012769467 @default.
- W2002821243 cites W2013734654 @default.
- W2002821243 cites W2014413280 @default.
- W2002821243 cites W2016553181 @default.
- W2002821243 cites W2017138464 @default.
- W2002821243 cites W2017924000 @default.
- W2002821243 cites W2018557716 @default.
- W2002821243 cites W2031101539 @default.
- W2002821243 cites W2034260885 @default.
- W2002821243 cites W2034885124 @default.
- W2002821243 cites W2037521233 @default.
- W2002821243 cites W2037654956 @default.
- W2002821243 cites W2038975046 @default.
- W2002821243 cites W2041263567 @default.
- W2002821243 cites W2042183174 @default.
- W2002821243 cites W2042284106 @default.
- W2002821243 cites W2042333178 @default.
- W2002821243 cites W2043837920 @default.
- W2002821243 cites W2044478176 @default.
- W2002821243 cites W2051087806 @default.
- W2002821243 cites W2053667303 @default.
- W2002821243 cites W2053736323 @default.
- W2002821243 cites W2055477205 @default.
- W2002821243 cites W2055960802 @default.
- W2002821243 cites W2056994782 @default.
- W2002821243 cites W2058129424 @default.
- W2002821243 cites W2058999682 @default.
- W2002821243 cites W2059705499 @default.
- W2002821243 cites W2060092554 @default.
- W2002821243 cites W2060367701 @default.
- W2002821243 cites W2060378139 @default.
- W2002821243 cites W2061059615 @default.
- W2002821243 cites W2062487702 @default.
- W2002821243 cites W2063509151 @default.
- W2002821243 cites W2064450815 @default.
- W2002821243 cites W2064924415 @default.
- W2002821243 cites W2066775368 @default.
- W2002821243 cites W2066960442 @default.
- W2002821243 cites W2067545621 @default.
- W2002821243 cites W2068817599 @default.
- W2002821243 cites W2070186390 @default.
- W2002821243 cites W2071142872 @default.
- W2002821243 cites W2071727688 @default.
- W2002821243 cites W2073136084 @default.
- W2002821243 cites W2073862387 @default.
- W2002821243 cites W2077470913 @default.
- W2002821243 cites W2078117685 @default.
- W2002821243 cites W2079815545 @default.
- W2002821243 cites W2080745628 @default.
- W2002821243 cites W2081483142 @default.
- W2002821243 cites W2083590781 @default.
- W2002821243 cites W2085294345 @default.
- W2002821243 cites W2085573578 @default.
- W2002821243 cites W2085744553 @default.
- W2002821243 cites W2086270072 @default.
- W2002821243 cites W2086386561 @default.
- W2002821243 cites W2089345517 @default.
- W2002821243 cites W2089593305 @default.
- W2002821243 cites W2089853456 @default.
- W2002821243 cites W2089860840 @default.