Matches in SemOpenAlex for { <https://semopenalex.org/work/W2002872543> ?p ?o ?g. }
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- W2002872543 endingPage "37" @default.
- W2002872543 startingPage "15" @default.
- W2002872543 abstract "A review of the research work in the modeling of current density distribution in acid copper electrodeposition is presented. Analytical, numerical and empirical modeling works are summarized under three categories: workpiece, pattern and feature scales, according to their principle objectives. The survey reveals how deposit uniformity is jointly affected by the process and product parameters of the system. It shows also that previous researchers have been concentrating more on the modeling of the current distribution and little work has been done on the modeling and control of the variability of the actual deposit thickness, particularly at the workpiece and pattern level." @default.
- W2002872543 created "2016-06-24" @default.
- W2002872543 creator A5007980109 @default.
- W2002872543 creator A5069677902 @default.
- W2002872543 date "1998-03-01" @default.
- W2002872543 modified "2023-10-18" @default.
- W2002872543 title "MODELING OF ACID COPPER ELECTROPLATING: A REVIEW" @default.
- W2002872543 doi "https://doi.org/10.1142/s0960313198000033" @default.
- W2002872543 hasPublicationYear "1998" @default.
- W2002872543 type Work @default.
- W2002872543 sameAs 2002872543 @default.
- W2002872543 citedByCount "8" @default.
- W2002872543 countsByYear W20028725432013 @default.
- W2002872543 countsByYear W20028725432014 @default.
- W2002872543 crossrefType "journal-article" @default.
- W2002872543 hasAuthorship W2002872543A5007980109 @default.
- W2002872543 hasAuthorship W2002872543A5069677902 @default.
- W2002872543 hasConcept C105795698 @default.
- W2002872543 hasConcept C119599485 @default.
- W2002872543 hasConcept C127413603 @default.
- W2002872543 hasConcept C148043351 @default.
- W2002872543 hasConcept C171250308 @default.
- W2002872543 hasConcept C18762648 @default.
- W2002872543 hasConcept C191897082 @default.
- W2002872543 hasConcept C192562407 @default.
- W2002872543 hasConcept C21880701 @default.
- W2002872543 hasConcept C2779227376 @default.
- W2002872543 hasConcept C2989031253 @default.
- W2002872543 hasConcept C33923547 @default.
- W2002872543 hasConcept C41008148 @default.
- W2002872543 hasConcept C51807945 @default.
- W2002872543 hasConcept C544778455 @default.
- W2002872543 hasConcept C78519656 @default.
- W2002872543 hasConceptScore W2002872543C105795698 @default.
- W2002872543 hasConceptScore W2002872543C119599485 @default.
- W2002872543 hasConceptScore W2002872543C127413603 @default.
- W2002872543 hasConceptScore W2002872543C148043351 @default.
- W2002872543 hasConceptScore W2002872543C171250308 @default.
- W2002872543 hasConceptScore W2002872543C18762648 @default.
- W2002872543 hasConceptScore W2002872543C191897082 @default.
- W2002872543 hasConceptScore W2002872543C192562407 @default.
- W2002872543 hasConceptScore W2002872543C21880701 @default.
- W2002872543 hasConceptScore W2002872543C2779227376 @default.
- W2002872543 hasConceptScore W2002872543C2989031253 @default.
- W2002872543 hasConceptScore W2002872543C33923547 @default.
- W2002872543 hasConceptScore W2002872543C41008148 @default.
- W2002872543 hasConceptScore W2002872543C51807945 @default.
- W2002872543 hasConceptScore W2002872543C544778455 @default.
- W2002872543 hasConceptScore W2002872543C78519656 @default.
- W2002872543 hasIssue "01" @default.
- W2002872543 hasLocation W20028725431 @default.
- W2002872543 hasOpenAccess W2002872543 @default.
- W2002872543 hasPrimaryLocation W20028725431 @default.
- W2002872543 hasRelatedWork W1974776238 @default.
- W2002872543 hasRelatedWork W1975700181 @default.
- W2002872543 hasRelatedWork W2367150687 @default.
- W2002872543 hasRelatedWork W2392905164 @default.
- W2002872543 hasRelatedWork W2883973521 @default.
- W2002872543 hasRelatedWork W2986454566 @default.
- W2002872543 hasRelatedWork W3197368573 @default.
- W2002872543 hasRelatedWork W3214111312 @default.
- W2002872543 hasRelatedWork W4206017467 @default.
- W2002872543 hasRelatedWork W4254972866 @default.
- W2002872543 hasVolume "08" @default.
- W2002872543 isParatext "false" @default.
- W2002872543 isRetracted "false" @default.
- W2002872543 magId "2002872543" @default.
- W2002872543 workType "article" @default.