FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2002974081> ?p ?o ?g. }

• W2002974081 abstract "Extreme ultraviolet (EUV) lithography is the leading contender for adoption as the next generationlithography technique. One of the critical challenges in this technology is producing defect-free masks.Particles generated in the fabrication process often deposit on the mask blank and result in phase andamplitude defects. Hence, it is important to study the transport, behavior and generation of particles in theion deposition tool used for mask blank deposition. We show results on detecting particles from ultrahighvacuum (UHV) valves by using optical counters and condensation particle counters. The particles werealso trapped using impactor plates and analyzed with Energy-dispersive x-ray spectroscopy (EDX) forelemental composition." @default.
• W2002974081 created "2016-06-24" @default.
• W2002974081 creator A5023194541 @default.
• W2002974081 creator A5027759138 @default.
• W2002974081 creator A5036480914 @default.
• W2002974081 creator A5037468826 @default.
• W2002974081 creator A5045190708 @default.
• W2002974081 creator A5062512501 @default.
• W2002974081 date "2012-03-29" @default.
• W2002974081 modified "2023-09-27" @default.
• W2002974081 title "Developing particle detection test bench for vacuum components" @default.
• W2002974081 cites W2074221668 @default.
• W2002974081 doi "https://doi.org/10.1117/12.919689" @default.
• W2002974081 hasPublicationYear "2012" @default.
• W2002974081 type Work @default.
• W2002974081 sameAs 2002974081 @default.
• W2002974081 citedByCount "0" @default.
• W2002974081 crossrefType "proceedings-article" @default.
• W2002974081 hasAuthorship W2002974081A5023194541 @default.
• W2002974081 hasAuthorship W2002974081A5027759138 @default.
• W2002974081 hasAuthorship W2002974081A5036480914 @default.
• W2002974081 hasAuthorship W2002974081A5037468826 @default.
• W2002974081 hasAuthorship W2002974081A5045190708 @default.
• W2002974081 hasAuthorship W2002974081A5062512501 @default.
• W2002974081 hasConcept C111368507 @default.
• W2002974081 hasConcept C120665830 @default.
• W2002974081 hasConcept C121332964 @default.
• W2002974081 hasConcept C127313418 @default.
• W2002974081 hasConcept C136525101 @default.
• W2002974081 hasConcept C142724271 @default.
• W2002974081 hasConcept C146024833 @default.
• W2002974081 hasConcept C151730666 @default.
• W2002974081 hasConcept C159985019 @default.
• W2002974081 hasConcept C162996421 @default.
• W2002974081 hasConcept C171250308 @default.
• W2002974081 hasConcept C192562407 @default.
• W2002974081 hasConcept C200093464 @default.
• W2002974081 hasConcept C204223013 @default.
• W2002974081 hasConcept C204787440 @default.
• W2002974081 hasConcept C2778089247 @default.
• W2002974081 hasConcept C2778517922 @default.
• W2002974081 hasConcept C2816523 @default.
• W2002974081 hasConcept C32891209 @default.
• W2002974081 hasConcept C49040817 @default.
• W2002974081 hasConcept C520434653 @default.
• W2002974081 hasConcept C62520636 @default.
• W2002974081 hasConcept C64297162 @default.
• W2002974081 hasConcept C71924100 @default.
• W2002974081 hasConcept C86803240 @default.
• W2002974081 hasConcept C97355855 @default.
• W2002974081 hasConceptScore W2002974081C111368507 @default.
• W2002974081 hasConceptScore W2002974081C120665830 @default.
• W2002974081 hasConceptScore W2002974081C121332964 @default.
• W2002974081 hasConceptScore W2002974081C127313418 @default.
• W2002974081 hasConceptScore W2002974081C136525101 @default.
• W2002974081 hasConceptScore W2002974081C142724271 @default.
• W2002974081 hasConceptScore W2002974081C146024833 @default.
• W2002974081 hasConceptScore W2002974081C151730666 @default.
• W2002974081 hasConceptScore W2002974081C159985019 @default.
• W2002974081 hasConceptScore W2002974081C162996421 @default.
• W2002974081 hasConceptScore W2002974081C171250308 @default.
• W2002974081 hasConceptScore W2002974081C192562407 @default.
• W2002974081 hasConceptScore W2002974081C200093464 @default.
• W2002974081 hasConceptScore W2002974081C204223013 @default.
• W2002974081 hasConceptScore W2002974081C204787440 @default.
• W2002974081 hasConceptScore W2002974081C2778089247 @default.
• W2002974081 hasConceptScore W2002974081C2778517922 @default.
• W2002974081 hasConceptScore W2002974081C2816523 @default.
• W2002974081 hasConceptScore W2002974081C32891209 @default.
• W2002974081 hasConceptScore W2002974081C49040817 @default.
• W2002974081 hasConceptScore W2002974081C520434653 @default.
• W2002974081 hasConceptScore W2002974081C62520636 @default.
• W2002974081 hasConceptScore W2002974081C64297162 @default.
• W2002974081 hasConceptScore W2002974081C71924100 @default.
• W2002974081 hasConceptScore W2002974081C86803240 @default.
• W2002974081 hasConceptScore W2002974081C97355855 @default.
• W2002974081 hasLocation W20029740811 @default.
• W2002974081 hasOpenAccess W2002974081 @default.
• W2002974081 hasPrimaryLocation W20029740811 @default.
• W2002974081 hasRelatedWork W1963679262 @default.
• W2002974081 hasRelatedWork W1968610816 @default.
• W2002974081 hasRelatedWork W1975052477 @default.
• W2002974081 hasRelatedWork W1985152818 @default.
• W2002974081 hasRelatedWork W1989066647 @default.
• W2002974081 hasRelatedWork W1990612834 @default.
• W2002974081 hasRelatedWork W1999414797 @default.
• W2002974081 hasRelatedWork W2007404485 @default.
• W2002974081 hasRelatedWork W2013525177 @default.
• W2002974081 hasRelatedWork W2017440048 @default.
• W2002974081 hasRelatedWork W2021537983 @default.
• W2002974081 hasRelatedWork W2024474289 @default.
• W2002974081 hasRelatedWork W2037427222 @default.
• W2002974081 hasRelatedWork W2051627558 @default.
• W2002974081 hasRelatedWork W2056928943 @default.
• W2002974081 hasRelatedWork W2074327829 @default.
• W2002974081 hasRelatedWork W2081598542 @default.
• W2002974081 hasRelatedWork W2111541651 @default.
• W2002974081 hasRelatedWork W2169276756 @default.
• W2002974081 hasRelatedWork W2979008713 @default.
• W2002974081 isParatext "false" @default.

• next