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- W2003077459 abstract "Tungsten is a promising bulk material for microsystem applications for its high melting point, radiation resistance, high strength and conductivity. In this paper, wafer level Tungsten-Glass wafer bonding was carried out with photodefinable BCB, the results were compared with Si-Glass bonding. A high-yield BCB bonding technology was developed with good uniformity and relatively high bonding strength, which can be used in future device integration and micropackage." @default.
- W2003077459 created "2016-06-24" @default.
- W2003077459 creator A5017705206 @default.
- W2003077459 creator A5025811950 @default.
- W2003077459 creator A5040179582 @default.
- W2003077459 creator A5046754662 @default.
- W2003077459 creator A5048379858 @default.
- W2003077459 creator A5048817987 @default.
- W2003077459 creator A5063936933 @default.
- W2003077459 creator A5078755295 @default.
- W2003077459 creator A5090952246 @default.
- W2003077459 date "2012-08-01" @default.
- W2003077459 modified "2023-09-30" @default.
- W2003077459 title "Wafer level Tungsten-Glass bonding with photosensitive BCB" @default.
- W2003077459 cites W2003749274 @default.
- W2003077459 cites W2083784951 @default.
- W2003077459 cites W2098912543 @default.
- W2003077459 cites W2103828109 @default.
- W2003077459 cites W2105164244 @default.
- W2003077459 cites W2116135098 @default.
- W2003077459 cites W2125217497 @default.
- W2003077459 cites W2157359031 @default.
- W2003077459 cites W2167255138 @default.
- W2003077459 doi "https://doi.org/10.1109/icept-hdp.2012.6474581" @default.
- W2003077459 hasPublicationYear "2012" @default.
- W2003077459 type Work @default.
- W2003077459 sameAs 2003077459 @default.
- W2003077459 citedByCount "2" @default.
- W2003077459 countsByYear W20030774592013 @default.
- W2003077459 countsByYear W20030774592015 @default.
- W2003077459 crossrefType "proceedings-article" @default.
- W2003077459 hasAuthorship W2003077459A5017705206 @default.
- W2003077459 hasAuthorship W2003077459A5025811950 @default.
- W2003077459 hasAuthorship W2003077459A5040179582 @default.
- W2003077459 hasAuthorship W2003077459A5046754662 @default.
- W2003077459 hasAuthorship W2003077459A5048379858 @default.
- W2003077459 hasAuthorship W2003077459A5048817987 @default.
- W2003077459 hasAuthorship W2003077459A5063936933 @default.
- W2003077459 hasAuthorship W2003077459A5078755295 @default.
- W2003077459 hasAuthorship W2003077459A5090952246 @default.
- W2003077459 hasConcept C134121241 @default.
- W2003077459 hasConcept C13530604 @default.
- W2003077459 hasConcept C151054161 @default.
- W2003077459 hasConcept C159985019 @default.
- W2003077459 hasConcept C160671074 @default.
- W2003077459 hasConcept C171250308 @default.
- W2003077459 hasConcept C191897082 @default.
- W2003077459 hasConcept C192562407 @default.
- W2003077459 hasConcept C201414436 @default.
- W2003077459 hasConcept C2779133538 @default.
- W2003077459 hasConcept C2984173401 @default.
- W2003077459 hasConcept C49040817 @default.
- W2003077459 hasConcept C542268612 @default.
- W2003077459 hasConceptScore W2003077459C134121241 @default.
- W2003077459 hasConceptScore W2003077459C13530604 @default.
- W2003077459 hasConceptScore W2003077459C151054161 @default.
- W2003077459 hasConceptScore W2003077459C159985019 @default.
- W2003077459 hasConceptScore W2003077459C160671074 @default.
- W2003077459 hasConceptScore W2003077459C171250308 @default.
- W2003077459 hasConceptScore W2003077459C191897082 @default.
- W2003077459 hasConceptScore W2003077459C192562407 @default.
- W2003077459 hasConceptScore W2003077459C201414436 @default.
- W2003077459 hasConceptScore W2003077459C2779133538 @default.
- W2003077459 hasConceptScore W2003077459C2984173401 @default.
- W2003077459 hasConceptScore W2003077459C49040817 @default.
- W2003077459 hasConceptScore W2003077459C542268612 @default.
- W2003077459 hasLocation W20030774591 @default.
- W2003077459 hasOpenAccess W2003077459 @default.
- W2003077459 hasPrimaryLocation W20030774591 @default.
- W2003077459 hasRelatedWork W1726154995 @default.
- W2003077459 hasRelatedWork W1853667117 @default.
- W2003077459 hasRelatedWork W1976401081 @default.
- W2003077459 hasRelatedWork W1986456852 @default.
- W2003077459 hasRelatedWork W2000410238 @default.
- W2003077459 hasRelatedWork W2003077459 @default.
- W2003077459 hasRelatedWork W2058155248 @default.
- W2003077459 hasRelatedWork W2085219868 @default.
- W2003077459 hasRelatedWork W2171418261 @default.
- W2003077459 hasRelatedWork W2546263172 @default.
- W2003077459 isParatext "false" @default.
- W2003077459 isRetracted "false" @default.
- W2003077459 magId "2003077459" @default.
- W2003077459 workType "article" @default.