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- W2003109426 abstract "This paper describes briefly importance of endpoint detection of the plasma etching and reactive-ion etching for LSI and VLSI circuits. The monitoring principle, design ideal and construction of the instrument for endpoint monitoring are described in the paper and monitoring results on line have been given. Finally the paper will discuss the load effect of the plasma etching and laser lateral interference influenced on monitor precision." @default.
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- W2003109426 date "1994-08-05" @default.
- W2003109426 modified "2023-10-01" @default.
- W2003109426 title "Optical endpoint detection of plasma etching and RIE for LSI circuits" @default.
- W2003109426 doi "https://doi.org/10.1117/12.182173" @default.
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