Matches in SemOpenAlex for { <https://semopenalex.org/work/W2003122020> ?p ?o ?g. }
Showing items 1 to 87 of
87
with 100 items per page.
- W2003122020 abstract "The recently developed JHU/APL magnetometer, which is based on a free-free (xylophone) resonating bar, is simple, small, light weight, has a low power consumption and utilizes the Lorentz force to measure vector magnetic fields. The device is intrinsically linear and has a wide dynamic range such that it can measure magnetic field strengths from nanoteslas to teslas. Furthermore, its sensitivity is independent of size for resonating bars of the same material and aspect ratio. This makes it ideally suited for miniaturization using MEMS techniques. Various polysilicon xylophone bars have been designed, processed, and characterized. The output response has verified the size-independent scaling law and sensitivities of the order of 100 nanoTesla have been achieved with drive currents as low as 20 microamps. This drive current is limited by the sheet resistance of the polysilicon support electrodes and directly affects the sensitivity. The electrodes also have a dramatic effect on the resonant frequency since they act as torsional stiffening members on the resonating bar. For example, for a 500 X 50 micron xylophone the resonant frequency varies from the designed 69 kHz to over 95 kHz for 10 micron wide support electrodes. The electrodes do not affect the mechanical Q-factors observed and values in excess of 20,000 at reduced pressures have been routinely obtained." @default.
- W2003122020 created "2016-06-24" @default.
- W2003122020 creator A5005362109 @default.
- W2003122020 creator A5024169051 @default.
- W2003122020 creator A5058179998 @default.
- W2003122020 creator A5070650016 @default.
- W2003122020 creator A5073677044 @default.
- W2003122020 creator A5076650593 @default.
- W2003122020 date "1999-08-31" @default.
- W2003122020 modified "2023-09-23" @default.
- W2003122020 title "<title>Polysilicon xylophone bar magnetometers</title>" @default.
- W2003122020 doi "https://doi.org/10.1117/12.360504" @default.
- W2003122020 hasPublicationYear "1999" @default.
- W2003122020 type Work @default.
- W2003122020 sameAs 2003122020 @default.
- W2003122020 citedByCount "4" @default.
- W2003122020 countsByYear W20031220202016 @default.
- W2003122020 crossrefType "proceedings-article" @default.
- W2003122020 hasAuthorship W2003122020A5005362109 @default.
- W2003122020 hasAuthorship W2003122020A5024169051 @default.
- W2003122020 hasAuthorship W2003122020A5058179998 @default.
- W2003122020 hasAuthorship W2003122020A5070650016 @default.
- W2003122020 hasAuthorship W2003122020A5073677044 @default.
- W2003122020 hasAuthorship W2003122020A5076650593 @default.
- W2003122020 hasConcept C115260700 @default.
- W2003122020 hasConcept C119599485 @default.
- W2003122020 hasConcept C120665830 @default.
- W2003122020 hasConcept C121332964 @default.
- W2003122020 hasConcept C127413603 @default.
- W2003122020 hasConcept C153294291 @default.
- W2003122020 hasConcept C153946474 @default.
- W2003122020 hasConcept C171250308 @default.
- W2003122020 hasConcept C17525397 @default.
- W2003122020 hasConcept C188721877 @default.
- W2003122020 hasConcept C192562407 @default.
- W2003122020 hasConcept C21200559 @default.
- W2003122020 hasConcept C24326235 @default.
- W2003122020 hasConcept C24890656 @default.
- W2003122020 hasConcept C37977207 @default.
- W2003122020 hasConcept C49040817 @default.
- W2003122020 hasConcept C57528182 @default.
- W2003122020 hasConcept C62520636 @default.
- W2003122020 hasConceptScore W2003122020C115260700 @default.
- W2003122020 hasConceptScore W2003122020C119599485 @default.
- W2003122020 hasConceptScore W2003122020C120665830 @default.
- W2003122020 hasConceptScore W2003122020C121332964 @default.
- W2003122020 hasConceptScore W2003122020C127413603 @default.
- W2003122020 hasConceptScore W2003122020C153294291 @default.
- W2003122020 hasConceptScore W2003122020C153946474 @default.
- W2003122020 hasConceptScore W2003122020C171250308 @default.
- W2003122020 hasConceptScore W2003122020C17525397 @default.
- W2003122020 hasConceptScore W2003122020C188721877 @default.
- W2003122020 hasConceptScore W2003122020C192562407 @default.
- W2003122020 hasConceptScore W2003122020C21200559 @default.
- W2003122020 hasConceptScore W2003122020C24326235 @default.
- W2003122020 hasConceptScore W2003122020C24890656 @default.
- W2003122020 hasConceptScore W2003122020C37977207 @default.
- W2003122020 hasConceptScore W2003122020C49040817 @default.
- W2003122020 hasConceptScore W2003122020C57528182 @default.
- W2003122020 hasConceptScore W2003122020C62520636 @default.
- W2003122020 hasLocation W20031220201 @default.
- W2003122020 hasOpenAccess W2003122020 @default.
- W2003122020 hasPrimaryLocation W20031220201 @default.
- W2003122020 hasRelatedWork W145876353 @default.
- W2003122020 hasRelatedWork W1499338301 @default.
- W2003122020 hasRelatedWork W1979779823 @default.
- W2003122020 hasRelatedWork W1987156788 @default.
- W2003122020 hasRelatedWork W2008858060 @default.
- W2003122020 hasRelatedWork W2046490692 @default.
- W2003122020 hasRelatedWork W2059152655 @default.
- W2003122020 hasRelatedWork W2060885779 @default.
- W2003122020 hasRelatedWork W2116669587 @default.
- W2003122020 hasRelatedWork W2242071184 @default.
- W2003122020 hasRelatedWork W2352730847 @default.
- W2003122020 hasRelatedWork W2373392623 @default.
- W2003122020 hasRelatedWork W2523493474 @default.
- W2003122020 hasRelatedWork W2554116485 @default.
- W2003122020 hasRelatedWork W2593811457 @default.
- W2003122020 hasRelatedWork W2609979837 @default.
- W2003122020 hasRelatedWork W2745023084 @default.
- W2003122020 hasRelatedWork W3106234590 @default.
- W2003122020 hasRelatedWork W3117689039 @default.
- W2003122020 hasRelatedWork W2341782086 @default.
- W2003122020 isParatext "false" @default.
- W2003122020 isRetracted "false" @default.
- W2003122020 magId "2003122020" @default.
- W2003122020 workType "article" @default.