Matches in SemOpenAlex for { <https://semopenalex.org/work/W2003123905> ?p ?o ?g. }
Showing items 1 to 88 of
88
with 100 items per page.
- W2003123905 endingPage "39" @default.
- W2003123905 startingPage "36" @default.
- W2003123905 abstract "Experimental results are presented which show that the self-bias voltage generated on the cathode of an asymmetric 13.56 MHz etching system system can be significantly reduced by electrically connecting a spatially separated annular ring to the cathode. At low pressures (<10 mu bar) the self-bias voltage of the double (hollow) cathode configuration can be a factor of 10 lower than that of conventional cathodes. Since the energy of ions arriving at the cathode depends on the self bias, this reduction would be reflected in the ion energy distribution. Etch rates of around 1.5 mu m min-1 at 10 mu bar and 800 W have been measured with SF6 plasmas and polycrystalline silicon. Etch uniformity of +or-5% edge to edge has been measured on a 4 inch wafer." @default.
- W2003123905 created "2016-06-24" @default.
- W2003123905 creator A5040194314 @default.
- W2003123905 date "1990-01-14" @default.
- W2003123905 modified "2023-09-26" @default.
- W2003123905 title "Self-bias reduction in plasma etching by a double-ring cathode" @default.
- W2003123905 cites W2029714357 @default.
- W2003123905 cites W2043599531 @default.
- W2003123905 doi "https://doi.org/10.1088/0022-3727/23/1/006" @default.
- W2003123905 hasPublicationYear "1990" @default.
- W2003123905 type Work @default.
- W2003123905 sameAs 2003123905 @default.
- W2003123905 citedByCount "1" @default.
- W2003123905 crossrefType "journal-article" @default.
- W2003123905 hasAuthorship W2003123905A5040194314 @default.
- W2003123905 hasConcept C100460472 @default.
- W2003123905 hasConcept C107187091 @default.
- W2003123905 hasConcept C113196181 @default.
- W2003123905 hasConcept C119599485 @default.
- W2003123905 hasConcept C121332964 @default.
- W2003123905 hasConcept C127413603 @default.
- W2003123905 hasConcept C130472188 @default.
- W2003123905 hasConcept C145148216 @default.
- W2003123905 hasConcept C147789679 @default.
- W2003123905 hasConcept C153294291 @default.
- W2003123905 hasConcept C160671074 @default.
- W2003123905 hasConcept C165801399 @default.
- W2003123905 hasConcept C171250308 @default.
- W2003123905 hasConcept C178790620 @default.
- W2003123905 hasConcept C184779094 @default.
- W2003123905 hasConcept C185592680 @default.
- W2003123905 hasConcept C188721877 @default.
- W2003123905 hasConcept C192562407 @default.
- W2003123905 hasConcept C20254490 @default.
- W2003123905 hasConcept C2779227376 @default.
- W2003123905 hasConcept C43617362 @default.
- W2003123905 hasConcept C49040817 @default.
- W2003123905 hasConcept C49110097 @default.
- W2003123905 hasConcept C544956773 @default.
- W2003123905 hasConcept C62520636 @default.
- W2003123905 hasConcept C82706917 @default.
- W2003123905 hasConceptScore W2003123905C100460472 @default.
- W2003123905 hasConceptScore W2003123905C107187091 @default.
- W2003123905 hasConceptScore W2003123905C113196181 @default.
- W2003123905 hasConceptScore W2003123905C119599485 @default.
- W2003123905 hasConceptScore W2003123905C121332964 @default.
- W2003123905 hasConceptScore W2003123905C127413603 @default.
- W2003123905 hasConceptScore W2003123905C130472188 @default.
- W2003123905 hasConceptScore W2003123905C145148216 @default.
- W2003123905 hasConceptScore W2003123905C147789679 @default.
- W2003123905 hasConceptScore W2003123905C153294291 @default.
- W2003123905 hasConceptScore W2003123905C160671074 @default.
- W2003123905 hasConceptScore W2003123905C165801399 @default.
- W2003123905 hasConceptScore W2003123905C171250308 @default.
- W2003123905 hasConceptScore W2003123905C178790620 @default.
- W2003123905 hasConceptScore W2003123905C184779094 @default.
- W2003123905 hasConceptScore W2003123905C185592680 @default.
- W2003123905 hasConceptScore W2003123905C188721877 @default.
- W2003123905 hasConceptScore W2003123905C192562407 @default.
- W2003123905 hasConceptScore W2003123905C20254490 @default.
- W2003123905 hasConceptScore W2003123905C2779227376 @default.
- W2003123905 hasConceptScore W2003123905C43617362 @default.
- W2003123905 hasConceptScore W2003123905C49040817 @default.
- W2003123905 hasConceptScore W2003123905C49110097 @default.
- W2003123905 hasConceptScore W2003123905C544956773 @default.
- W2003123905 hasConceptScore W2003123905C62520636 @default.
- W2003123905 hasConceptScore W2003123905C82706917 @default.
- W2003123905 hasIssue "1" @default.
- W2003123905 hasLocation W20031239051 @default.
- W2003123905 hasOpenAccess W2003123905 @default.
- W2003123905 hasPrimaryLocation W20031239051 @default.
- W2003123905 hasRelatedWork W1821108436 @default.
- W2003123905 hasRelatedWork W1984600933 @default.
- W2003123905 hasRelatedWork W2052794911 @default.
- W2003123905 hasRelatedWork W2063417252 @default.
- W2003123905 hasRelatedWork W2087201154 @default.
- W2003123905 hasRelatedWork W2145279613 @default.
- W2003123905 hasRelatedWork W2148289258 @default.
- W2003123905 hasRelatedWork W3095830240 @default.
- W2003123905 hasRelatedWork W65767922 @default.
- W2003123905 hasRelatedWork W2044417772 @default.
- W2003123905 hasVolume "23" @default.
- W2003123905 isParatext "false" @default.
- W2003123905 isRetracted "false" @default.
- W2003123905 magId "2003123905" @default.
- W2003123905 workType "article" @default.