FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2003142718> ?p ?o ?g. }

• W2003142718 endingPage "419" @default.
• W2003142718 startingPage "415" @default.
• W2003142718 abstract "An ion-beam mixing technique is used to fabricate ultrashallow p+/n junctions. In this method, a thin boron layer is first sputter deposited onto the Si wafer surface. Then a 10–40 keV Ge ion beam or −3 kV Ar plasma source ion implantation (PSII) is used to knock the boron atoms into the Si substrate by means of ion-beam mixing. For the thin (0.7 nm) boron layers used in this effort, a selective etch for the removal of boron is unnecessary. Sub-100 nm p+/n junctions have been realized with this method. Numerical simulations, performed to predict the recoiled boron profiles, show good agreement between the simulated and measured data." @default.
• W2003142718 created "2016-06-24" @default.
• W2003142718 creator A5024428087 @default.
• W2003142718 creator A5044756052 @default.
• W2003142718 creator A5053927442 @default.
• W2003142718 creator A5070568554 @default.
• W2003142718 date "1998-01-01" @default.
• W2003142718 modified "2023-10-01" @default.
• W2003142718 title "Recoil implantation of boron into silicon for ultrashallow junction formation: Modeling, fabrication, and characterization" @default.
• W2003142718 cites W1988961841 @default.
• W2003142718 cites W2051737366 @default.
• W2003142718 cites W2055397870 @default.
• W2003142718 cites W2094355608 @default.
• W2003142718 cites W2106490467 @default.
• W2003142718 cites W2143644904 @default.
• W2003142718 cites W2151258929 @default.
• W2003142718 cites W2166101047 @default.
• W2003142718 cites W2167849002 @default.
• W2003142718 doi "https://doi.org/10.1116/1.589823" @default.
• W2003142718 hasPublicationYear "1998" @default.
• W2003142718 type Work @default.
• W2003142718 sameAs 2003142718 @default.
• W2003142718 citedByCount "9" @default.
• W2003142718 countsByYear W20031427182013 @default.
• W2003142718 countsByYear W20031427182022 @default.
• W2003142718 countsByYear W20031427182023 @default.
• W2003142718 crossrefType "journal-article" @default.
• W2003142718 hasAuthorship W2003142718A5024428087 @default.
• W2003142718 hasAuthorship W2003142718A5044756052 @default.
• W2003142718 hasAuthorship W2003142718A5053927442 @default.
• W2003142718 hasAuthorship W2003142718A5070568554 @default.
• W2003142718 hasConcept C111368507 @default.
• W2003142718 hasConcept C113196181 @default.
• W2003142718 hasConcept C127313418 @default.
• W2003142718 hasConcept C136525101 @default.
• W2003142718 hasConcept C142724271 @default.
• W2003142718 hasConcept C145148216 @default.
• W2003142718 hasConcept C160671074 @default.
• W2003142718 hasConcept C171250308 @default.
• W2003142718 hasConcept C178790620 @default.
• W2003142718 hasConcept C185592680 @default.
• W2003142718 hasConcept C19067145 @default.
• W2003142718 hasConcept C192562407 @default.
• W2003142718 hasConcept C204787440 @default.
• W2003142718 hasConcept C22423302 @default.
• W2003142718 hasConcept C2777289219 @default.
• W2003142718 hasConcept C2779227376 @default.
• W2003142718 hasConcept C41823505 @default.
• W2003142718 hasConcept C43617362 @default.
• W2003142718 hasConcept C49040817 @default.
• W2003142718 hasConcept C501308230 @default.
• W2003142718 hasConcept C50774322 @default.
• W2003142718 hasConcept C544956773 @default.
• W2003142718 hasConcept C71924100 @default.
• W2003142718 hasConcept C79176676 @default.
• W2003142718 hasConcept C93106096 @default.
• W2003142718 hasConceptScore W2003142718C111368507 @default.
• W2003142718 hasConceptScore W2003142718C113196181 @default.
• W2003142718 hasConceptScore W2003142718C127313418 @default.
• W2003142718 hasConceptScore W2003142718C136525101 @default.
• W2003142718 hasConceptScore W2003142718C142724271 @default.
• W2003142718 hasConceptScore W2003142718C145148216 @default.
• W2003142718 hasConceptScore W2003142718C160671074 @default.
• W2003142718 hasConceptScore W2003142718C171250308 @default.
• W2003142718 hasConceptScore W2003142718C178790620 @default.
• W2003142718 hasConceptScore W2003142718C185592680 @default.
• W2003142718 hasConceptScore W2003142718C19067145 @default.
• W2003142718 hasConceptScore W2003142718C192562407 @default.
• W2003142718 hasConceptScore W2003142718C204787440 @default.
• W2003142718 hasConceptScore W2003142718C22423302 @default.
• W2003142718 hasConceptScore W2003142718C2777289219 @default.
• W2003142718 hasConceptScore W2003142718C2779227376 @default.
• W2003142718 hasConceptScore W2003142718C41823505 @default.
• W2003142718 hasConceptScore W2003142718C43617362 @default.
• W2003142718 hasConceptScore W2003142718C49040817 @default.
• W2003142718 hasConceptScore W2003142718C501308230 @default.
• W2003142718 hasConceptScore W2003142718C50774322 @default.
• W2003142718 hasConceptScore W2003142718C544956773 @default.
• W2003142718 hasConceptScore W2003142718C71924100 @default.
• W2003142718 hasConceptScore W2003142718C79176676 @default.
• W2003142718 hasConceptScore W2003142718C93106096 @default.
• W2003142718 hasIssue "1" @default.
• W2003142718 hasLocation W20031427181 @default.
• W2003142718 hasOpenAccess W2003142718 @default.
• W2003142718 hasPrimaryLocation W20031427181 @default.
• W2003142718 hasRelatedWork W1522940206 @default.
• W2003142718 hasRelatedWork W1989487550 @default.
• W2003142718 hasRelatedWork W2003142718 @default.
• W2003142718 hasRelatedWork W2041194175 @default.
• W2003142718 hasRelatedWork W2058938207 @default.
• W2003142718 hasRelatedWork W2076786300 @default.
• W2003142718 hasRelatedWork W2165653175 @default.
• W2003142718 hasRelatedWork W234451777 @default.
• W2003142718 hasRelatedWork W2350862848 @default.
• W2003142718 hasRelatedWork W2371667353 @default.
• W2003142718 hasVolume "16" @default.
• W2003142718 isParatext "false" @default.
• W2003142718 isRetracted "false" @default.

• next