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- W2003143443 endingPage "832" @default.
- W2003143443 startingPage "832" @default.
- W2003143443 abstract "The characteristics of poly (polycrystalline) 3C-SiC grown on SiO2 and AlN buffer layers by CVD are described. XRD and FT-IR were used to obtain the crystallinity and Si-C bonding structure of the poly 3C-SiC according to various growth temperatures and buffer layers. The surface chemical composition and the electron mobility of the poly 3C-SiC grown on each buffer layer were investigated by XPS and the Hall effect." @default.
- W2003143443 created "2016-06-24" @default.
- W2003143443 creator A5015664116 @default.
- W2003143443 creator A5028577029 @default.
- W2003143443 date "2007-01-01" @default.
- W2003143443 modified "2023-09-24" @default.
- W2003143443 title "Heteroepitaxy of polycrystalline 3C-SiC film on Si substrate using AlN buffer layer" @default.
- W2003143443 cites W1536724015 @default.
- W2003143443 cites W1981821025 @default.
- W2003143443 cites W1989843325 @default.
- W2003143443 cites W2028616445 @default.
- W2003143443 cites W2090025492 @default.
- W2003143443 doi "https://doi.org/10.1049/el:20071263" @default.
- W2003143443 hasPublicationYear "2007" @default.
- W2003143443 type Work @default.
- W2003143443 sameAs 2003143443 @default.
- W2003143443 citedByCount "2" @default.
- W2003143443 crossrefType "journal-article" @default.
- W2003143443 hasAuthorship W2003143443A5015664116 @default.
- W2003143443 hasAuthorship W2003143443A5028577029 @default.
- W2003143443 hasConcept C110738630 @default.
- W2003143443 hasConcept C111368507 @default.
- W2003143443 hasConcept C119599485 @default.
- W2003143443 hasConcept C127313418 @default.
- W2003143443 hasConcept C127413603 @default.
- W2003143443 hasConcept C137637335 @default.
- W2003143443 hasConcept C145018004 @default.
- W2003143443 hasConcept C159985019 @default.
- W2003143443 hasConcept C175708663 @default.
- W2003143443 hasConcept C191897082 @default.
- W2003143443 hasConcept C192562407 @default.
- W2003143443 hasConcept C2777289219 @default.
- W2003143443 hasConcept C2779227376 @default.
- W2003143443 hasConcept C42360764 @default.
- W2003143443 hasConcept C46275449 @default.
- W2003143443 hasConcept C49040817 @default.
- W2003143443 hasConceptScore W2003143443C110738630 @default.
- W2003143443 hasConceptScore W2003143443C111368507 @default.
- W2003143443 hasConceptScore W2003143443C119599485 @default.
- W2003143443 hasConceptScore W2003143443C127313418 @default.
- W2003143443 hasConceptScore W2003143443C127413603 @default.
- W2003143443 hasConceptScore W2003143443C137637335 @default.
- W2003143443 hasConceptScore W2003143443C145018004 @default.
- W2003143443 hasConceptScore W2003143443C159985019 @default.
- W2003143443 hasConceptScore W2003143443C175708663 @default.
- W2003143443 hasConceptScore W2003143443C191897082 @default.
- W2003143443 hasConceptScore W2003143443C192562407 @default.
- W2003143443 hasConceptScore W2003143443C2777289219 @default.
- W2003143443 hasConceptScore W2003143443C2779227376 @default.
- W2003143443 hasConceptScore W2003143443C42360764 @default.
- W2003143443 hasConceptScore W2003143443C46275449 @default.
- W2003143443 hasConceptScore W2003143443C49040817 @default.
- W2003143443 hasIssue "15" @default.
- W2003143443 hasLocation W20031434431 @default.
- W2003143443 hasOpenAccess W2003143443 @default.
- W2003143443 hasPrimaryLocation W20031434431 @default.
- W2003143443 hasRelatedWork W158146401 @default.
- W2003143443 hasRelatedWork W1986382865 @default.
- W2003143443 hasRelatedWork W1996777073 @default.
- W2003143443 hasRelatedWork W2002100600 @default.
- W2003143443 hasRelatedWork W2003143443 @default.
- W2003143443 hasRelatedWork W2019261704 @default.
- W2003143443 hasRelatedWork W2040123902 @default.
- W2003143443 hasRelatedWork W3115037099 @default.
- W2003143443 hasRelatedWork W3138062243 @default.
- W2003143443 hasRelatedWork W3148656784 @default.
- W2003143443 hasVolume "43" @default.
- W2003143443 isParatext "false" @default.
- W2003143443 isRetracted "false" @default.
- W2003143443 magId "2003143443" @default.
- W2003143443 workType "article" @default.