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- W2003156696 endingPage "386" @default.
- W2003156696 startingPage "383" @default.
- W2003156696 abstract "The evolution of the grain structure through annealing of narrow damascene Cu interconnects is important for any further design of highly integrated circuits. Here we present a comprehensive transmission electron microscopy study of damascene lines between 80 nm and 3000 nm wide. Experimental results clearly indicate that morphology evolutions through annealing are strongly influenced by the line width. If the lines are wider than 250 nm a strong connection between the grain structure within the lines and the overburden copper is present at least after sufficient annealing. Once the lines are as small as 80 nm the grain structure within the lines are only weakly connected to the overburden copper grown above." @default.
- W2003156696 created "2016-06-24" @default.
- W2003156696 creator A5035225987 @default.
- W2003156696 creator A5045837015 @default.
- W2003156696 creator A5051935342 @default.
- W2003156696 creator A5056280342 @default.
- W2003156696 creator A5057033374 @default.
- W2003156696 date "2010-03-01" @default.
- W2003156696 modified "2023-10-18" @default.
- W2003156696 title "Grain morphology of Cu damascene lines" @default.
- W2003156696 cites W1969290153 @default.
- W2003156696 cites W1986329512 @default.
- W2003156696 cites W2006649844 @default.
- W2003156696 cites W2008008867 @default.
- W2003156696 cites W2034089924 @default.
- W2003156696 cites W2038251424 @default.
- W2003156696 cites W2069377610 @default.
- W2003156696 cites W2074084175 @default.
- W2003156696 doi "https://doi.org/10.1016/j.mee.2009.05.033" @default.
- W2003156696 hasPublicationYear "2010" @default.
- W2003156696 type Work @default.
- W2003156696 sameAs 2003156696 @default.
- W2003156696 citedByCount "14" @default.
- W2003156696 countsByYear W20031566962012 @default.
- W2003156696 countsByYear W20031566962013 @default.
- W2003156696 countsByYear W20031566962014 @default.
- W2003156696 countsByYear W20031566962015 @default.
- W2003156696 countsByYear W20031566962019 @default.
- W2003156696 countsByYear W20031566962022 @default.
- W2003156696 countsByYear W20031566962023 @default.
- W2003156696 crossrefType "journal-article" @default.
- W2003156696 hasAuthorship W2003156696A5035225987 @default.
- W2003156696 hasAuthorship W2003156696A5045837015 @default.
- W2003156696 hasAuthorship W2003156696A5051935342 @default.
- W2003156696 hasAuthorship W2003156696A5056280342 @default.
- W2003156696 hasAuthorship W2003156696A5057033374 @default.
- W2003156696 hasConcept C116372231 @default.
- W2003156696 hasConcept C127313418 @default.
- W2003156696 hasConcept C138113353 @default.
- W2003156696 hasConcept C146088050 @default.
- W2003156696 hasConcept C16674752 @default.
- W2003156696 hasConcept C171250308 @default.
- W2003156696 hasConcept C180088628 @default.
- W2003156696 hasConcept C191897082 @default.
- W2003156696 hasConcept C192191005 @default.
- W2003156696 hasConcept C192562407 @default.
- W2003156696 hasConcept C2777201227 @default.
- W2003156696 hasConcept C2777855556 @default.
- W2003156696 hasConcept C47908070 @default.
- W2003156696 hasConcept C49040817 @default.
- W2003156696 hasConcept C544778455 @default.
- W2003156696 hasConcept C87976508 @default.
- W2003156696 hasConcept C98390173 @default.
- W2003156696 hasConceptScore W2003156696C116372231 @default.
- W2003156696 hasConceptScore W2003156696C127313418 @default.
- W2003156696 hasConceptScore W2003156696C138113353 @default.
- W2003156696 hasConceptScore W2003156696C146088050 @default.
- W2003156696 hasConceptScore W2003156696C16674752 @default.
- W2003156696 hasConceptScore W2003156696C171250308 @default.
- W2003156696 hasConceptScore W2003156696C180088628 @default.
- W2003156696 hasConceptScore W2003156696C191897082 @default.
- W2003156696 hasConceptScore W2003156696C192191005 @default.
- W2003156696 hasConceptScore W2003156696C192562407 @default.
- W2003156696 hasConceptScore W2003156696C2777201227 @default.
- W2003156696 hasConceptScore W2003156696C2777855556 @default.
- W2003156696 hasConceptScore W2003156696C47908070 @default.
- W2003156696 hasConceptScore W2003156696C49040817 @default.
- W2003156696 hasConceptScore W2003156696C544778455 @default.
- W2003156696 hasConceptScore W2003156696C87976508 @default.
- W2003156696 hasConceptScore W2003156696C98390173 @default.
- W2003156696 hasIssue "3" @default.
- W2003156696 hasLocation W20031566961 @default.
- W2003156696 hasLocation W20031566962 @default.
- W2003156696 hasLocation W20031566963 @default.
- W2003156696 hasOpenAccess W2003156696 @default.
- W2003156696 hasPrimaryLocation W20031566961 @default.
- W2003156696 hasRelatedWork W2003156696 @default.
- W2003156696 hasRelatedWork W2005024133 @default.
- W2003156696 hasRelatedWork W2031176887 @default.
- W2003156696 hasRelatedWork W2130273821 @default.
- W2003156696 hasRelatedWork W2140917630 @default.
- W2003156696 hasRelatedWork W2143803780 @default.
- W2003156696 hasRelatedWork W2354762707 @default.
- W2003156696 hasRelatedWork W2546194799 @default.
- W2003156696 hasRelatedWork W2565058983 @default.
- W2003156696 hasRelatedWork W4281746734 @default.
- W2003156696 hasVolume "87" @default.
- W2003156696 isParatext "false" @default.
- W2003156696 isRetracted "false" @default.
- W2003156696 magId "2003156696" @default.
- W2003156696 workType "article" @default.