Matches in SemOpenAlex for { <https://semopenalex.org/work/W2003160722> ?p ?o ?g. }
Showing items 1 to 85 of
85
with 100 items per page.
- W2003160722 abstract "With the push toward the 32nm node, OPC modeling must respond in kind with additional accuracy enhancements. One area of lithographic modeling that has basically gone unchecked is mask fidelity. Mask linearity is typically built into the OPC model since the calibration data contain this information, but mask pattern fidelity is almost impossible to quantify for OPC modeling. Mask fidelity is the rounding and smoothing of the mask features relative to the post-OPC layout intent, and there is no robust metric available to quantify these effects. With the introduction of contour-based model calibration, mask fidelity modeling is possible. This work evaluates techniques to quantify mask modeling and methods to gauge the accuracy improvement that mask fidelity modeling would project into the lithographic process using contour-based mask model calibration." @default.
- W2003160722 created "2016-06-24" @default.
- W2003160722 creator A5031491705 @default.
- W2003160722 creator A5035439041 @default.
- W2003160722 creator A5062439831 @default.
- W2003160722 creator A5075725662 @default.
- W2003160722 creator A5087052857 @default.
- W2003160722 creator A5088882443 @default.
- W2003160722 date "2008-03-14" @default.
- W2003160722 modified "2023-10-02" @default.
- W2003160722 title "SEM-contour based mask modeling" @default.
- W2003160722 cites W1897604386 @default.
- W2003160722 cites W1977766097 @default.
- W2003160722 cites W1980584182 @default.
- W2003160722 cites W1989488083 @default.
- W2003160722 cites W2060791384 @default.
- W2003160722 cites W2071066024 @default.
- W2003160722 cites W2142731943 @default.
- W2003160722 doi "https://doi.org/10.1117/12.776669" @default.
- W2003160722 hasPublicationYear "2008" @default.
- W2003160722 type Work @default.
- W2003160722 sameAs 2003160722 @default.
- W2003160722 citedByCount "1" @default.
- W2003160722 crossrefType "proceedings-article" @default.
- W2003160722 hasAuthorship W2003160722A5031491705 @default.
- W2003160722 hasAuthorship W2003160722A5035439041 @default.
- W2003160722 hasAuthorship W2003160722A5062439831 @default.
- W2003160722 hasAuthorship W2003160722A5075725662 @default.
- W2003160722 hasAuthorship W2003160722A5087052857 @default.
- W2003160722 hasAuthorship W2003160722A5088882443 @default.
- W2003160722 hasConcept C111919701 @default.
- W2003160722 hasConcept C120665830 @default.
- W2003160722 hasConcept C121332964 @default.
- W2003160722 hasConcept C154945302 @default.
- W2003160722 hasConcept C162324750 @default.
- W2003160722 hasConcept C165838908 @default.
- W2003160722 hasConcept C167343916 @default.
- W2003160722 hasConcept C176217482 @default.
- W2003160722 hasConcept C204223013 @default.
- W2003160722 hasConcept C21547014 @default.
- W2003160722 hasConcept C2776459999 @default.
- W2003160722 hasConcept C31972630 @default.
- W2003160722 hasConcept C3770464 @default.
- W2003160722 hasConcept C41008148 @default.
- W2003160722 hasConcept C44154836 @default.
- W2003160722 hasConcept C62520636 @default.
- W2003160722 hasConcept C76155785 @default.
- W2003160722 hasConcept C78371743 @default.
- W2003160722 hasConcept C98045186 @default.
- W2003160722 hasConceptScore W2003160722C111919701 @default.
- W2003160722 hasConceptScore W2003160722C120665830 @default.
- W2003160722 hasConceptScore W2003160722C121332964 @default.
- W2003160722 hasConceptScore W2003160722C154945302 @default.
- W2003160722 hasConceptScore W2003160722C162324750 @default.
- W2003160722 hasConceptScore W2003160722C165838908 @default.
- W2003160722 hasConceptScore W2003160722C167343916 @default.
- W2003160722 hasConceptScore W2003160722C176217482 @default.
- W2003160722 hasConceptScore W2003160722C204223013 @default.
- W2003160722 hasConceptScore W2003160722C21547014 @default.
- W2003160722 hasConceptScore W2003160722C2776459999 @default.
- W2003160722 hasConceptScore W2003160722C31972630 @default.
- W2003160722 hasConceptScore W2003160722C3770464 @default.
- W2003160722 hasConceptScore W2003160722C41008148 @default.
- W2003160722 hasConceptScore W2003160722C44154836 @default.
- W2003160722 hasConceptScore W2003160722C62520636 @default.
- W2003160722 hasConceptScore W2003160722C76155785 @default.
- W2003160722 hasConceptScore W2003160722C78371743 @default.
- W2003160722 hasConceptScore W2003160722C98045186 @default.
- W2003160722 hasLocation W20031607221 @default.
- W2003160722 hasOpenAccess W2003160722 @default.
- W2003160722 hasPrimaryLocation W20031607221 @default.
- W2003160722 hasRelatedWork W1967748003 @default.
- W2003160722 hasRelatedWork W2013602766 @default.
- W2003160722 hasRelatedWork W2016418211 @default.
- W2003160722 hasRelatedWork W2020117440 @default.
- W2003160722 hasRelatedWork W2028851912 @default.
- W2003160722 hasRelatedWork W2036929567 @default.
- W2003160722 hasRelatedWork W2048363233 @default.
- W2003160722 hasRelatedWork W2052518479 @default.
- W2003160722 hasRelatedWork W2409660592 @default.
- W2003160722 hasRelatedWork W2533544427 @default.
- W2003160722 isParatext "false" @default.
- W2003160722 isRetracted "false" @default.
- W2003160722 magId "2003160722" @default.
- W2003160722 workType "article" @default.