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- W2003160779 abstract "In order to stabilize the metastable NaCl structure (the δ phase) of NbN at low temperatures, NbN films sputtered on sapphire substrates were thermally quenched immediately after deposition by thermal conduction from a water-or liq. N 2 -cooled anode container, or by direct spraying of liq. N 2 onto the as-sputtered film. When the cooling rate Q r was increased, the superconducting transition temperature T c and the resistance ratio β(= R 300K / R 20K ) changed from a slightly downward trend to an upward one near Q r =10 4 °C/min. Above this value of Q r , X-ray analysis indicated that the growth of the δ phase was enhanced, while that of the ε phase was depressed. The broad transition width Δ T c which appeared at a value of Q r between 2×10 3 and 10 4 °C/min is considered to be closely related to the coexistence of the δ and ε phases." @default.
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- W2003160779 date "1984-02-01" @default.
- W2003160779 modified "2023-09-27" @default.
- W2003160779 title "Effect of Quenching Immediately after Sputtering on Superconducting NbN Films" @default.
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- W2003160779 doi "https://doi.org/10.1143/jjap.23.184" @default.
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