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- W2003164958 endingPage "3560" @default.
- W2003164958 startingPage "3557" @default.
- W2003164958 abstract "We demonstrate the nanoimprint lithography (NIL) technique with sub 100 nm resolution, on 6 in. Si substrates. The pattern transfer is performed using a specially designed NIL machine optimized to achieve a very high degree of parallelism between stamp and substrate. The stamp is made with the help of electron beam lithography and Ni electroplating achieving features below 100 nm in size. The nanoimprint process is done in a single layer as well as in a multilayer resist scheme with subsequent O2-plasma etching and metal lift-off." @default.
- W2003164958 created "2016-06-24" @default.
- W2003164958 creator A5001253883 @default.
- W2003164958 creator A5019790639 @default.
- W2003164958 creator A5030286574 @default.
- W2003164958 date "2000-11-01" @default.
- W2003164958 modified "2023-10-11" @default.
- W2003164958 title "Nanoimprint lithography at the 6 in. wafer scale" @default.
- W2003164958 cites W1984490429 @default.
- W2003164958 cites W1996389496 @default.
- W2003164958 cites W2010045669 @default.
- W2003164958 cites W2043444356 @default.
- W2003164958 cites W4234109392 @default.
- W2003164958 doi "https://doi.org/10.1116/1.1326923" @default.
- W2003164958 hasPublicationYear "2000" @default.
- W2003164958 type Work @default.
- W2003164958 sameAs 2003164958 @default.
- W2003164958 citedByCount "119" @default.
- W2003164958 countsByYear W20031649582012 @default.
- W2003164958 countsByYear W20031649582013 @default.
- W2003164958 countsByYear W20031649582014 @default.
- W2003164958 countsByYear W20031649582015 @default.
- W2003164958 countsByYear W20031649582016 @default.
- W2003164958 countsByYear W20031649582017 @default.
- W2003164958 countsByYear W20031649582018 @default.
- W2003164958 countsByYear W20031649582019 @default.
- W2003164958 countsByYear W20031649582020 @default.
- W2003164958 countsByYear W20031649582021 @default.
- W2003164958 countsByYear W20031649582022 @default.
- W2003164958 countsByYear W20031649582023 @default.
- W2003164958 crossrefType "journal-article" @default.
- W2003164958 hasAuthorship W2003164958A5001253883 @default.
- W2003164958 hasAuthorship W2003164958A5019790639 @default.
- W2003164958 hasAuthorship W2003164958A5030286574 @default.
- W2003164958 hasConcept C100460472 @default.
- W2003164958 hasConcept C136525101 @default.
- W2003164958 hasConcept C142724271 @default.
- W2003164958 hasConcept C160671074 @default.
- W2003164958 hasConcept C162117346 @default.
- W2003164958 hasConcept C163581340 @default.
- W2003164958 hasConcept C171250308 @default.
- W2003164958 hasConcept C192562407 @default.
- W2003164958 hasConcept C200274948 @default.
- W2003164958 hasConcept C204223013 @default.
- W2003164958 hasConcept C204787440 @default.
- W2003164958 hasConcept C2777046567 @default.
- W2003164958 hasConcept C2779227376 @default.
- W2003164958 hasConcept C41794268 @default.
- W2003164958 hasConcept C49040817 @default.
- W2003164958 hasConcept C51807945 @default.
- W2003164958 hasConcept C53524968 @default.
- W2003164958 hasConcept C70520399 @default.
- W2003164958 hasConcept C71924100 @default.
- W2003164958 hasConceptScore W2003164958C100460472 @default.
- W2003164958 hasConceptScore W2003164958C136525101 @default.
- W2003164958 hasConceptScore W2003164958C142724271 @default.
- W2003164958 hasConceptScore W2003164958C160671074 @default.
- W2003164958 hasConceptScore W2003164958C162117346 @default.
- W2003164958 hasConceptScore W2003164958C163581340 @default.
- W2003164958 hasConceptScore W2003164958C171250308 @default.
- W2003164958 hasConceptScore W2003164958C192562407 @default.
- W2003164958 hasConceptScore W2003164958C200274948 @default.
- W2003164958 hasConceptScore W2003164958C204223013 @default.
- W2003164958 hasConceptScore W2003164958C204787440 @default.
- W2003164958 hasConceptScore W2003164958C2777046567 @default.
- W2003164958 hasConceptScore W2003164958C2779227376 @default.
- W2003164958 hasConceptScore W2003164958C41794268 @default.
- W2003164958 hasConceptScore W2003164958C49040817 @default.
- W2003164958 hasConceptScore W2003164958C51807945 @default.
- W2003164958 hasConceptScore W2003164958C53524968 @default.
- W2003164958 hasConceptScore W2003164958C70520399 @default.
- W2003164958 hasConceptScore W2003164958C71924100 @default.
- W2003164958 hasIssue "6" @default.
- W2003164958 hasLocation W20031649581 @default.
- W2003164958 hasOpenAccess W2003164958 @default.
- W2003164958 hasPrimaryLocation W20031649581 @default.
- W2003164958 hasRelatedWork W1937460790 @default.
- W2003164958 hasRelatedWork W2007880660 @default.
- W2003164958 hasRelatedWork W2169253278 @default.
- W2003164958 hasRelatedWork W2325400957 @default.
- W2003164958 hasRelatedWork W2613536306 @default.
- W2003164958 hasRelatedWork W2747816848 @default.
- W2003164958 hasRelatedWork W377256889 @default.
- W2003164958 hasRelatedWork W4213177537 @default.
- W2003164958 hasRelatedWork W4298193905 @default.
- W2003164958 hasRelatedWork W806091262 @default.
- W2003164958 hasVolume "18" @default.
- W2003164958 isParatext "false" @default.
- W2003164958 isRetracted "false" @default.
- W2003164958 magId "2003164958" @default.
- W2003164958 workType "article" @default.