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- W2003171 abstract "is credited to a special zeolite backing pump which eliminated mechanical-pump contamination by doubling as a trap during roughing. (auth)" @default.
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- W2003171 date "1965-10-31" @default.
- W2003171 modified "2023-09-27" @default.
- W2003171 title "AN UNCONVENTIONAL ULTRA-HIGH VACUUM FACILITY" @default.
- W2003171 doi "https://doi.org/10.2172/4579019" @default.
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