Matches in SemOpenAlex for { <https://semopenalex.org/work/W2003193714> ?p ?o ?g. }
Showing items 1 to 71 of
71
with 100 items per page.
- W2003193714 endingPage "857" @default.
- W2003193714 startingPage "853" @default.
- W2003193714 abstract "A new model for the analysis of resist heating is proposed and applied to the direct electron beam writing method using a variably-shaped electron beam system and a single-layer resist. From calculations based on the present model and experiment, it was found that the resist heating effect leads to resist ablation, difference in resist sensitivity between single exposure and multiple exposures, and depth dependence and beam size dependence of resist sensitivity. It also explains the degradation of shaped beam stitching accuracy as well as pattern size error. The resist heating effect is more serious for direct writing than the estimation obtained from a conventional model. In order to realize submicron patterns below 0.5 μm with considerable high throughput, the use of a highly sensitive resist is essential for overcoming the resist heating effect." @default.
- W2003193714 created "2016-06-24" @default.
- W2003193714 creator A5003936795 @default.
- W2003193714 date "1988-05-01" @default.
- W2003193714 modified "2023-10-06" @default.
- W2003193714 title "Resist heating effect in direct electron beam writing" @default.
- W2003193714 doi "https://doi.org/10.1116/1.584309" @default.
- W2003193714 hasPublicationYear "1988" @default.
- W2003193714 type Work @default.
- W2003193714 sameAs 2003193714 @default.
- W2003193714 citedByCount "26" @default.
- W2003193714 countsByYear W20031937142014 @default.
- W2003193714 countsByYear W20031937142016 @default.
- W2003193714 countsByYear W20031937142018 @default.
- W2003193714 countsByYear W20031937142019 @default.
- W2003193714 countsByYear W20031937142020 @default.
- W2003193714 countsByYear W20031937142021 @default.
- W2003193714 crossrefType "journal-article" @default.
- W2003193714 hasAuthorship W2003193714A5003936795 @default.
- W2003193714 hasBestOaLocation W20031937141 @default.
- W2003193714 hasConcept C120665830 @default.
- W2003193714 hasConcept C121332964 @default.
- W2003193714 hasConcept C134406635 @default.
- W2003193714 hasConcept C147120987 @default.
- W2003193714 hasConcept C168834538 @default.
- W2003193714 hasConcept C171250308 @default.
- W2003193714 hasConcept C192562407 @default.
- W2003193714 hasConcept C200274948 @default.
- W2003193714 hasConcept C204223013 @default.
- W2003193714 hasConcept C2779227376 @default.
- W2003193714 hasConcept C29081049 @default.
- W2003193714 hasConcept C49040817 @default.
- W2003193714 hasConcept C53524968 @default.
- W2003193714 hasConcept C62520636 @default.
- W2003193714 hasConcept C95312477 @default.
- W2003193714 hasConceptScore W2003193714C120665830 @default.
- W2003193714 hasConceptScore W2003193714C121332964 @default.
- W2003193714 hasConceptScore W2003193714C134406635 @default.
- W2003193714 hasConceptScore W2003193714C147120987 @default.
- W2003193714 hasConceptScore W2003193714C168834538 @default.
- W2003193714 hasConceptScore W2003193714C171250308 @default.
- W2003193714 hasConceptScore W2003193714C192562407 @default.
- W2003193714 hasConceptScore W2003193714C200274948 @default.
- W2003193714 hasConceptScore W2003193714C204223013 @default.
- W2003193714 hasConceptScore W2003193714C2779227376 @default.
- W2003193714 hasConceptScore W2003193714C29081049 @default.
- W2003193714 hasConceptScore W2003193714C49040817 @default.
- W2003193714 hasConceptScore W2003193714C53524968 @default.
- W2003193714 hasConceptScore W2003193714C62520636 @default.
- W2003193714 hasConceptScore W2003193714C95312477 @default.
- W2003193714 hasIssue "3" @default.
- W2003193714 hasLocation W20031937141 @default.
- W2003193714 hasOpenAccess W2003193714 @default.
- W2003193714 hasPrimaryLocation W20031937141 @default.
- W2003193714 hasRelatedWork W1972916030 @default.
- W2003193714 hasRelatedWork W1994435029 @default.
- W2003193714 hasRelatedWork W2006103628 @default.
- W2003193714 hasRelatedWork W2016899188 @default.
- W2003193714 hasRelatedWork W2026713851 @default.
- W2003193714 hasRelatedWork W2036302744 @default.
- W2003193714 hasRelatedWork W2043777656 @default.
- W2003193714 hasRelatedWork W2109578211 @default.
- W2003193714 hasRelatedWork W1965928302 @default.
- W2003193714 hasRelatedWork W2018780667 @default.
- W2003193714 hasVolume "6" @default.
- W2003193714 isParatext "false" @default.
- W2003193714 isRetracted "false" @default.
- W2003193714 magId "2003193714" @default.
- W2003193714 workType "article" @default.